Patents by Inventor Daisuke Tanooka

Daisuke Tanooka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of evaluating an anisotropic thin film and an evaluating apparatus
    Patent number: 6486951
    Abstract: In an apparatus for evaluating an anisotropic thin film, an optical system generates a light beam having a predetermined diameter and polaraization state to project the light beam as incident light into a thin film sample corresponding to the anisotropic thin film. An analyzer is disposed at an optically down stream side of the thin film sample. At an optically down stream side of the analyzer, a two-dimensional photo-intensity detector is disposed to detect reflected light, obtained from the thin film sample, through the analyzer. The detector produces a light intensity distribution. On the basis of the light intensity distribution, an evaluating unit evaluates an inplane distribution of an optical anisotropy of the thin film sample.
    Type: Grant
    Filed: March 23, 2001
    Date of Patent: November 26, 2002
    Assignees: NEC Corporation, Nippon Laser & Electronics Lab.
    Inventors: Ichiro Hirosawa, Daisuke Tanooka
  • Method of evaluating an anisotropic thin film and an evaluating apparatus
    Publication number: 20010024277
    Abstract: In an apparatus for evaluating an anisotropic thin film, an optical system generates a light beam having a predetermined diameter and polaraization state to project the light beam as incident light into a thin film sample corresponding to the anisotropic thin film. An analyzer is disposed at an optically down stream side of the thin film sample. At an optically down stream side of the analyzer, a two-dimensional photo-intensity detector is disposed to detect reflected light, obtained from the thin film sample, through the analyzer. The detector produces a light intensity distribution. On the basis of the light intensity distribution, an evaluating unit evaluates an inplane distribution of an optical anisotropy of the thin film sample.
    Type: Application
    Filed: March 23, 2001
    Publication date: September 27, 2001
    Applicant: NEC Corporation and Nippon Laser & Electronics Lab.
    Inventors: Ichiro Hirosawa, Daisuke Tanooka