Abstract: Described herein is a technique capable of efficiently removing a foreign substance in a reaction tube. According to one aspect of the technique, there is provided a substrate processing apparatus including: a reaction tube in which a substrate is processed; and a substrate retainer including a plurality of support columns configured to support the substrate, wherein at least one among the plurality of the support columns includes: a hollow portion through which an inert gas is supplied; and a gas supply port through which the inert gas is supplied toward an inner wall of the reaction tube.

Abstract: An airbag fabric, airbag and method for making the airbag fabric, the fabric consisting of warp and weft yarns of synthetic fiber yarn, characterized by satisfying the following requirements: (1) the total fineness of the synthetic fiber yarn is 100 to 700 dtex; (2) Nf/Nw?1.10 wherein, Nw represents the weaving density of warp yarns (yarns/2.54 cm) and Nf represents the weaving density of weft yarns (yarns/2.54 cm); (3) EC1?400N and EC2?400N wherein, EC1 represents the edgecomb resistance (N) in the machine direction, as determined according to ASTM D6479-02, and EC2 represents the edgecomb resistance (N) in the crosswise direction as determined according to ASTM D6479-02; (4) 0.85?EC2/EC1?1.15; and (5) the air permeability, as determined according to the Frajour type method specified in JIS L1096 at a test pressure difference of 19.6 kPa, is 1.0 L/cm2·min or less.

Abstract: The present invention relates to multifilament crimped yarn comprising an aliphatic polyester and methods for producing thereof, and to carpets that are manufactured by using the crimped yarn. The present invention provides an aliphatic polyester multifilament crimped yarn for the carpets comprising an aliphatic polyester having a melting point of equal to or higher than 130° C., said multifilament crimped yarn having crimp elongation rate of the multifilament crimped yarn after being processed with boiling water of 3-35% and breaking strength of 1-5 cN/decitex.

Abstract: An airbag fabric, airbag and method for making the airbag fabric, the fabric consisting of warp and weft yarns of synthetic fiber yarn, characterized by satisfying the following requirements: (1) the total fineness of the synthetic fiber yarn is 100 to 700 dtex; (2) Nf/Nw?1.10 wherein, Nw represents the weaving density of warp yarns (yarns/2.54 cm) and Nf represents the weaving density of weft yarns (yarns/2.54 cm); (3) EC1?400N and EC2?400N wherein, EC1 represents the edgecomb resistance (N) in the machine direction, as determined according to ASTM D6479-02, and EC2 represents the edgecomb resistance (N) in the crosswise direction as determined according to ASTM D6479-02; (4) 0.85?EC2/EC1?1.15; and (5) the air permeability, as determined according to the Frajour type method specified in JIS L1096 at a test pressure difference of 19.6 kPa, is 1.0 L/cm2·min or less.

Abstract: The present invention relates to multifilament crimped yarn comprising an aliphatic polyester and methods for producing thereof, and to carpets that are manufactured by using the crimped yarn. The present invention provides an aliphatic polyester multifilament crimped yarn for the carpets comprising an aliphatic polyester having a melting point of equal to or higher than 130° C., said multifilament crimped yarn having crimp elongation rate of the multifilament crimped yarn after being processed with boiling water of 3-35% and breaking strength of 1-5 cN/decitex.

Abstract: The present invention relates to multifilament crimped yarn comprising an aliphatic polyester and methods for producing thereof, and to carpets that are manufactured by using the crimped yarn. The present invention provides an aliphatic polyester multifilament crimped yarn for the carpets comprising an aliphatic polyester having a melting point of equal to or higher than 130° C., said multifilament crimped yarn having crimp elongation rate of the multifilament crimped yarn after being processed with boiling water of 3-35% and breaking strength of 1-5 cN/decitex.

Abstract: The present invention relates to multifilament crimped yarn comprising an aliphatic polyester and methods for producing thereof, and to carpets that are manufactured by using the crimped yarn. The present invention provides an aliphatic polyester multifilament crimped yarn for the carpets comprising an aliphatic polyester having a melting point of equal to or higher than 130° C., said multifilament crimped yarn having crimp elongation rate of the multifilament crimped yarn after being processed with boiling water of 3-35% and breaking strength of 1-5 cN/decitex.

Abstract: The present invention relates to multifilament crimped yarn comprising an aliphatic polyester and methods for producing thereof, and to carpets that are manufactured by using the crimped yarn. The present invention provides an aliphatic polyester multifilament crimped yarn for the carpets comprising an aliphatic polyester having a melting point of equal to or higher than 130° C., said multifilament crimped yarn having crimped elongation rate of the multifilament crimped yarn after being processed with boiling water of 3-35% and breaking strength of 1-5 cN/decitex.