Abstract: A probe substrate includes a probe having a plurality of beams and a contactor formed at one end of the beam, and a support substrate for supporting the probe and having a bending space in which the probe moves upwards and downwards. The beam and the contactor are made of the same metal, and the sidewall of the contactor has a staircase configuration. Therefore, the probe substrate and the manufacturing method thereof repeats the lithographic process and the plating process to form the probe having the beam and the contactor combined, thereby increasing the bending degree and structural stability of the probe.

Abstract: A probe card includes a plurality of probe modules, a multi-layer ceramic substrate provided below the probe module, and a solder ball for connecting the probe module and the multi-layer ceramic substrate, and the height of the solder ball is controlled depending on location of the multi-layer ceramic substrate. Therefore, the probe card and manufacturing method thereof improves the accuracy of the test process by matching the height of the probe of the probe module and the reference planarization line when a planarity of the multi-layer ceramic substrate is bad or is varied during the probe card assembling process.

Abstract: A probe substrate includes a probe having a plurality of beams and a contactor formed at one end of the beam, and a support substrate for supporting the probe and having a bending space in which the probe moves upwards and downwards. The beam and the contactor are made of the same metal, and the sidewall of the contactor has a staircase configuration. Therefore, the probe substrate and the manufacturing method thereof repeats the lithographic process and the plating process to form the probe having the beam and the contactor combined, thereby increasing the bending degree and structural stability of the probe.

Abstract: A probe substrate includes a plurality of beams, a probe having a contactor formed at one end of the beam, and a support substrate supporting the probe and having a bending space in which the probe can be bent upwards and downwards, and a trench oxide layer is formed on the upper surface of the support substrate. Therefore, the probe substrate and a manufacturing method thereof according to the present invention forms a trench oxide layer on the boundary of the beam and the support substrate to prevent the boundary from being damaged by stress applied to the boundary according to continuous and repeated bending of the beam. Therefore, electrical insulation between the beam and the support substrate is maintained to prevent electrical leakage.

Abstract: A method for confirming an optimum focus of a stepper. A plurality of photoresist patterns are formed at a predetermined energy while changing focus by use of a reticle of a diagonally asymmetric box-in-box structure. The optimum focus can be obtained by taking advantage of the change of the line width of the photoresist patterns with defocus degrees.