Patents by Inventor Dale A. Lien

Dale A. Lien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation system
    Patent number: 6617593
    Abstract: An ion implantation system of the kind including an ion source, an electrode plate, an extraction voltage supply, and a substrate holder is described. The electrode plate initially has an opening of about 6.35 mm which is enlarged to about 8.38 mm. The aperture is also tapered outwardly on a side thereof opposing the ion source. It has been found that such an electrode plate creates substantially lower suppression currents.
    Type: Grant
    Filed: December 4, 2000
    Date of Patent: September 9, 2003
    Assignee: Intel Corporation
    Inventor: Dale A. Lien
  • Ion implantation system
    Publication number: 20020066871
    Abstract: An ion implantation system of the kind including an ion source, an electrode plate, an extraction voltage supply, and a substrate holder is described. The electrode plate initially has an opening of about 6.35 mm which is enlarged to about 8.38 mm. The aperture is also tapered outwardly on a side thereof opposing the ion source. It has been found that such an electrode plate creates substantially lower suppression currents.
    Type: Application
    Filed: December 4, 2000
    Publication date: June 6, 2002
    Inventor: Dale A. Lien