Patents by Inventor Dale K. Stone
Dale K. Stone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11631588Abstract: A method of doping a substrate. The method may include providing a substrate in a process chamber. The substrate may include a semiconductor structure, and a dopant layer disposed on a surface of the semiconductor structure. The method may include maintaining the substrate at a first temperature for a first interval, the first temperature corresponding to a vaporization temperature of the dopant layer. The method may further include rapidly cooling the substrate to a second temperature, less than the first temperature, and heating the substrate from the second temperature to a third temperature, greater than the first temperature.Type: GrantFiled: January 10, 2020Date of Patent: April 18, 2023Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Christopher R. Hatem, Piero Sferlazzo, Roger Fish, Dale K. Stone
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Patent number: 11473978Abstract: A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.Type: GrantFiled: September 4, 2019Date of Patent: October 18, 2022Assignee: APPLIED Materials, Inc.Inventors: Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone, Steven Anella, Ron Serisky, Chi-Yang Cheng
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Publication number: 20200381271Abstract: A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes.Type: ApplicationFiled: September 4, 2019Publication date: December 3, 2020Applicant: APPLIED Materials, Inc.Inventors: Dawei Sun, Dale K. Stone, D. Jeffrey Lischer, Lyudmila Stone, Steven Anella, Julian G. Blake, Ron Serisky, Daniel A. Hall, Robert H. Bettencourt
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Publication number: 20200378837Abstract: A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.Type: ApplicationFiled: September 4, 2019Publication date: December 3, 2020Applicant: APPLIED Materials, Inc.Inventors: Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone, Steven Anella, Ron Serisky, Chi-Yang Cheng
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Patent number: 10658207Abstract: Techniques for reducing particle contamination on a substrate are disclosed. In one particular exemplary embodiment, the technique may be realized with a platen having different regions, where the pressure levels in the regions may be substantially equal. For example, the platen may comprise a platen body comprising first and second recesses, the first recess defining a fluid region for holding fluid for maintaining a temperature of the substrate at a desired temperature, the second recess defining a first cavity for holding a ground circuit; a first via defined in the platen body, the first via having first and second openings, the first opening proximate to the fluid region and the second opening proximate to the first cavity, wherein pressure level of the fluid region may be maintained at a level that is substantially equal to pressure level of the first cavity.Type: GrantFiled: April 16, 2018Date of Patent: May 19, 2020Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh
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Publication number: 20200152466Abstract: A method of doping a substrate. The method may include providing a substrate in a process chamber. The substrate may include a semiconductor structure, and a dopant layer disposed on a surface of the semiconductor structure. The method may include maintaining the substrate at a first temperature for a first interval, the first temperature corresponding to a vaporization temperature of the dopant layer. The method may further include rapidly cooling the substrate to a second temperature, less than the first temperature, and heating the substrate from the second temperature to a third temperature, greater than the first temperature.Type: ApplicationFiled: January 10, 2020Publication date: May 14, 2020Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Christopher R. Hatem, Piero Sferlazzo, Roger Fish, Dale K. Stone
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Patent number: 10541137Abstract: A method of doping a substrate. The method may include providing a substrate in a process chamber. The substrate may include a semiconductor structure, and a dopant layer disposed on a surface of the semiconductor structure. The method may include maintaining the substrate at a first temperature for a first interval, the first temperature corresponding to a vaporization temperature of the dopant layer. The method may further include rapidly cooling the substrate to a second temperature, less than the first temperature, and heating the substrate from the second temperature to a third temperature, greater than the first temperature.Type: GrantFiled: June 1, 2018Date of Patent: January 21, 2020Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventors: Christopher R. Hatem, Piero Sferlazzo, Roger Fish, Dale K. Stone
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Publication number: 20190371608Abstract: A method of doping a substrate. The method may include providing a substrate in a process chamber. The substrate may include a semiconductor structure, and a dopant layer disposed on a surface of the semiconductor structure. The method may include maintaining the substrate at a first temperature for a first interval, the first temperature corresponding to a vaporization temperature of the dopant layer. The method may further include rapidly cooling the substrate to a second temperature, less than the first temperature, and heating the substrate from the second temperature to a third temperature, greater than the first temperature.Type: ApplicationFiled: June 1, 2018Publication date: December 5, 2019Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Christopher R. Hatem, Piero Sferlazzo, Roger Fish, Dale K. Stone
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Patent number: 10385454Abstract: In one embodiment, a method of fabricating an electrostatic clamp includes forming an insulator body, forming an electrode on the insulator body, and depositing a layer stack on the electrode, the layer stack comprising an aluminum oxide layer that is deposited using atomic layer deposition (ALD).Type: GrantFiled: March 3, 2017Date of Patent: August 20, 2019Assignees: Varian Semiconductor Equipment Associates, Inc., Entegris, Inc.Inventors: Dale K. Stone, Richard Cooke, I-Kuan Lin, Julian G. Blake, Lyudmila Stone
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Publication number: 20190252230Abstract: An apparatus to support a substrate may include a base and an insulator portion adjacent to the base and configured to support a surface of the substrate. The apparatus may also include an electrode system to apply a clamping voltage to the substrate, wherein the insulator portion is configured to provide a gas to the substrate through at least one channel that has a channel width, wherein a product of the gas pressure and channel width is less than a Paschen minimum for the gas, where the Paschen minimum is a product of pressure and separation of surfaces of an enclosure at which a breakdown voltage of the gas is a minimum.Type: ApplicationFiled: April 29, 2019Publication date: August 15, 2019Inventors: Dale K. Stone, Julian G. Blake, Lyudmila Stone
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Patent number: 10157764Abstract: A thermal shield is disclosed that may be disposed between a heated electrostatic chuck and a base. The thermal shield comprises a thermal insulator, such as a polyimide film, having a thickness of between 1 and 5 mils. The polyimide film is coated on one side with a layer of reflective material, such as aluminum. The layer of reflective material may be between 30 and 100 nanometers. The thermal shield is disposed such that the layer of reflective material is closer to the chuck. Because of the thinness of the layer of reflective material, the thermal shield does not retain a significant amount of heat. Further, the temperature of the thermal shield remains far below the glass transition temperature of the polyimide film.Type: GrantFiled: June 6, 2016Date of Patent: December 18, 2018Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Dale K. Stone, David J. Chipman
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Publication number: 20180233386Abstract: Techniques for reducing particle contamination on a substrate are disclosed. In one particular exemplary embodiment, the technique may be realized with a platen having different regions, where the pressure levels in the regions may be substantially equal. For example, the platen may comprise a platen body comprising first and second recesses, the first recess defining a fluid region for holding fluid for maintaining a temperature of the substrate at a desired temperature, the second recess defining a first cavity for holding a ground circuit; a first via defined in the platen body, the first via having first and second openings, the first opening proximate to the fluid region and the second opening proximate to the first cavity, wherein pressure level of the fluid region may be maintained at a level that is substantially equal to pressure level of the first cavity.Type: ApplicationFiled: April 16, 2018Publication date: August 16, 2018Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh
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Patent number: 9953849Abstract: Techniques for reducing particle contamination on a substrate are disclosed. In one particular exemplary embodiment, the technique may be realized with a platen having different regions, where the pressure levels in the regions may be substantially equal. For example, the platen may comprise a platen body comprising first and second recesses, the first recess defining a fluid region for holding fluid for maintaining a temperature of the substrate at a desired temperature, the second recess defining a first cavity for holding a ground circuit; a first via defined in the platen body, the first via having first and second openings, the first opening proximate to the fluid region and the second opening proximate to the first cavity, wherein pressure level of the fluid region may be maintained at a level that is substantially equal to pressure level of the first cavity.Type: GrantFiled: March 25, 2014Date of Patent: April 24, 2018Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventors: David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh
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Publication number: 20170335460Abstract: In one embodiment, a method of fabricating an electrostatic clamp includes forming an insulator body, forming an electrode on the insulator body, and depositing a layer stack on the electrode, the layer stack comprising an aluminum oxide layer that is deposited using atomic layer deposition (ALD).Type: ApplicationFiled: March 3, 2017Publication date: November 23, 2017Inventors: Dale K. Stone, Richard Cooke, I-Kuan Lin, Julian G. Blake, Lyudmila Stone
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Patent number: 9692325Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 108 to about 1012 ohms per square.Type: GrantFiled: September 8, 2011Date of Patent: June 27, 2017Assignees: Entegris, Inc., Varian Semiconductor Equipment Associates, Inc.Inventors: David Suuronen, Lyudmila Stone, Julian Blake, Dale K. Stone, Richard A. Cooke, Steven Donnell, Chandra Venkatraman
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Patent number: 9644269Abstract: In one embodiment, a method of fabricating an electrostatic clamp includes forming an insulator body, forming an electrode on the insulator body, and depositing a layer stack on the electrode, the layer stack comprising an aluminum oxide layer that is deposited using atomic layer deposition (ALD).Type: GrantFiled: May 16, 2014Date of Patent: May 9, 2017Assignee: Varian Semiconductor Equipment Associates, IncInventors: Dale K. Stone, Richard Cooke, I-Kuan Lin, Julian G. Blake, Lyudmila Stone
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Patent number: 9633875Abstract: An apparatus for improving the temperature uniformity of a workpiece during processing is disclosed. The apparatus includes a platen having a separately controlled edge heater capable to independently heating the outer edge of the platen. In this way, additional heat may be supplied near the outer edge of the platen, helping to maintain a constant temperature across the entirety of the platen. This edge heater may be disposed on an outer surface of the platen, or may, in certain embodiments, be embedded in the platen. In certain embodiments, the edge heater and the primary heating element are disposed in two different planes, where the edge heater is disposed closer to the top surface of the platen than the primary heating element.Type: GrantFiled: March 13, 2015Date of Patent: April 25, 2017Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Dawei Sun, D. Jeffrey Lischer, Steven M. Anella, Dale K. Stone, Lyudmila Stone
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Publication number: 20160379861Abstract: A thermal shield is disclosed that may be disposed between a heated electrostatic chuck and a base. The thermal shield comprises a thermal insulator, such as a polyimide film, having a thickness of between 1 and 5 mils. The polyimide film is coated on one side with a layer of reflective material, such as aluminum. The layer of reflective material may be between 30 and 100 nanometers. The thermal shield is disposed such that the layer of reflective material is closer to the chuck. Because of the thinness of the layer of reflective material, the thermal shield does not retain a significant amount of heat. Further, the temperature of the thermal shield remains far below the glass transition temperature of the polyimide film.Type: ApplicationFiled: June 6, 2016Publication date: December 29, 2016Inventors: Dale K. Stone, David J. Chipman
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Publication number: 20160268150Abstract: An apparatus for improving the temperature uniformity of a workpiece during processing is disclosed. The apparatus includes a platen having a separately controlled edge heater capable to independently heating the outer edge of the platen. In this way, additional heat may be supplied near the outer edge of the platen, helping to maintain a constant temperature across the entirety of the platen. This edge heater may be disposed on an outer surface of the platen, or may, in certain embodiments, be embedded in the platen. In certain embodiments, the edge heater and the primary heating element are disposed in two different planes, where the edge heater is disposed closer to the top surface of the platen than the primary heating element.Type: ApplicationFiled: March 13, 2015Publication date: September 15, 2016Inventors: Dawei Sun, D. Jeffrey Lischer, Steven M. Anella, Dale K. Stone, Lyudmila Stone
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Publication number: 20150279704Abstract: Techniques for reducing particle contamination on a substrate are disclosed. In one particular exemplary embodiment, the technique may be realized with a platen having different regions, where the pressure levels in the regions may be substantially equal. For example, the platen may comprise a platen body comprising first and second recesses, the first recess defining a fluid region for holding fluid for maintaining a temperature of the substrate at a desired temperature, the second recess defining a first cavity for holding a ground circuit; a first via defined in the platen body, the first via having first and second openings, the first opening proximate to the fluid region and the second opening proximate to the first cavity, wherein pressure level of the fluid region may be maintained at a level that is substantially equal to pressure level of the first cavity.Type: ApplicationFiled: March 25, 2014Publication date: October 1, 2015Inventors: David E. Suuronen, Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh