Patents by Inventor Dale Linseth

Dale Linseth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Autofocus system
    Patent number: 6624403
    Abstract: An autofocus system for maintaining a sample in the focal plane of a primary lens is disclosed. A light source generates a monitor beam which is focused onto the sample through the primary lens. The reflected beam passes back through the primary lens and is directed to a secondary lens. The beam is then split by a reflective wedge into two portions with different path lengths such that the beam waists of the two portions are spatially separated. An aperture is located between the two beam waists. A bi-cell photodetector measures the intensity of the two beam portions transmitted by the aperture. The measured intensity levels vary with respect to the position of the sample. By comparing the measured intensity levels, an indication of the position of the sample can be obtained.
    Type: Grant
    Filed: October 11, 2001
    Date of Patent: September 23, 2003
    Assignee: Therma-Wave, Inc.
    Inventors: Li Chen, Martin Ebert, Dale Linseth
  • Autofocus system
    Publication number: 20030071190
    Abstract: An autofocus system for maintaining a sample in the focal plane of a primary lens is disclosed. A light source generates a monitor beam which is focused onto the sample through the primary lens. The reflected beam passes back through the primary lens and is directed to a secondary lens. The beam is then split by a reflective wedge into two portions with different path lengths such that the beam waists of the two portions are spatially separated. An aperture is located between the two beam waists. A bi-cell photodetector measures the intensity of the two beam portions transmitted by the aperture. The measured intensity levels vary with respect to the position of the sample. By comparing the measured intensity levels, an indication of the position of the sample can be obtained.
    Type: Application
    Filed: October 11, 2001
    Publication date: April 17, 2003
    Inventors: Li Chen, Martin Ebert, Dale Linseth