Patents by Inventor Damon K. Cox
Damon K. Cox has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240075613Abstract: Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.Type: ApplicationFiled: November 3, 2023Publication date: March 7, 2024Inventors: Jeff Hudgens, Damon K. Cox, Rajkumar Thanu
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Publication number: 20240071802Abstract: A robot apparatus with variable end effector pitch is provided suitable for accommodating varying pitches, e.g., between two adjacent processing chambers or between two adjacent load lock chambers. The robot apparatus may operate in dual substrate handling mode, single substrate handling mode, or a combination thereof. The robot apparatus may also be an off-axis robot. A variety of robot apparatuses according to various embodiments, electronic device processing systems including such robot apparatuses, and methods of use thereof are described.Type: ApplicationFiled: August 16, 2023Publication date: February 29, 2024Inventors: Paul Z. Wirth, Damon K. Cox, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeffrey C. Hudgens
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Publication number: 20240042595Abstract: A method of transporting substrates within an electronic device processing system includes rotating a first upper arm of a first arm assembly of a robot. The rotating causes a first end effector of the first arm assembly to move along a first path. The first arm assembly includes the first upper arm, a first forearm, a first wrist member, and the first end effector configured to support a first substrate. The method further includes rotating a second upper arm of a second arm assembly of the robot. The rotating causes a second end effector of the second arm assembly to move along a second path. The second arm assembly includes the second upper arm, a second forearm, a second wrist member, and the second end effector configured to support a second substrate. The second substrate does not overlap with the first substrate in any operating position of the end effectors.Type: ApplicationFiled: October 19, 2023Publication date: February 8, 2024Inventors: Karuppasamy Muthukamatchi, Jeffrey C. Hudgens, Damon K. Cox
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Publication number: 20240025670Abstract: A carrier includes a carrier body configured to be supported on a robot to transport one or more process kit rings within a substrate processing system. The carrier further includes fingers extending from the carrier body. The fingers are configured to support the one or more process kit rings. A first finger of the plurality of fingers includes an upper surface that forms a recess to receive the one or more process kit rings.Type: ApplicationFiled: September 29, 2023Publication date: January 25, 2024Inventors: Aaron Green, Nicholas Michael Bergantz, Damon K. Cox, Andreas Schmid
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Patent number: 11850742Abstract: A robot may include a first arm assembly including a first upper arm rotatable about a first axis; a first forearm adapted for rotation relative to the first upper arm about a second axis; a first wrist member adapted for rotation relative to the first forearm about a third axis; and a first end effector coupled to the first wrist member, wherein the first end effector is moveable along a first path. A second arm assembly may include a second upper arm rotatable about the first axis; a second forearm adapted for rotation relative to the second upper arm about a fourth axis; a second wrist member adapted for rotation relative to the second forearm; and a second end effector coupled to the second wrist member, wherein the second end effector is moveable along a second path that does not overlap the first path. Other apparatus and methods are disclosed.Type: GrantFiled: April 16, 2020Date of Patent: December 26, 2023Assignee: Applied Materials, Inc.Inventors: Karuppasamy Muthukamatchi, Jeffrey C. Hudgens, Damon K. Cox
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Patent number: 11850745Abstract: Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.Type: GrantFiled: August 12, 2022Date of Patent: December 26, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Jeff Hudgens, Damon K. Cox, Rajkumar Thanu
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Patent number: 11842917Abstract: A process kit ring adaptor includes one or more upper surfaces and one or more lower surfaces. The one or more upper surfaces are configured to support a process kit ring. The one or more lower surfaces are configured to interface with an end effector. The process kit ring adaptor supporting the process kit ring is configured to be transported on the end effector within a processing system.Type: GrantFiled: March 29, 2021Date of Patent: December 12, 2023Assignee: Applied Materials, Inc.Inventors: Leon Volfovski, Andreas Schmid, Denis Martin Koosau, Nicholas Michael Kopec, Steven Babayan, Douglas R. McAllister, Helder Lee, Jeffrey Hudgens, Damon K. Cox
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Publication number: 20230364794Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.Type: ApplicationFiled: July 19, 2023Publication date: November 16, 2023Inventors: Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
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Publication number: 20230307273Abstract: A robotic object handling system comprises a robot arm, an image sensor, a first station, and a computing device. The computing device is to cause the robot arm to pick up an object on an end effector, cause the image sensor to generate sensor data of the object, determine at least one of (i) a rotational error of the object or (ii) a positional error of the object based on the sensor data, cause an adjustment to the robot arm to approximately remove at least one of the rotational error or the positional error, and cause the robot arm to place the object at the first station without at least one of the rotational error or the positional error.Type: ApplicationFiled: March 28, 2023Publication date: September 28, 2023Inventors: Nicholas Michael Kopec, Damon K. Cox, Leon Volfovski
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Patent number: 11766782Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.Type: GrantFiled: April 28, 2020Date of Patent: September 26, 2023Assignee: Applied Materials, Inc.Inventors: Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
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Patent number: 11770049Abstract: A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.Type: GrantFiled: September 23, 2020Date of Patent: September 26, 2023Assignee: Applied Materials, Inc.Inventors: Alexander Berger, Paul Lawrence Korff, William Paul Laceky, Jeffrey C. Hudgens, Rajkumar Thanu, Damon K. Cox, Matvey Farber
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Patent number: 11759954Abstract: A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.Type: GrantFiled: April 28, 2020Date of Patent: September 19, 2023Assignee: Applied Materials, Inc.Inventors: Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
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Publication number: 20230132174Abstract: A robot apparatus is configured to extend a first end effector into a first process chamber and extend a second end effector into a second process chamber. The first process chamber and the second process chamber are separated by a first pitch. The robot apparatus is further configured to retract the first end effector and the second end effector into a rectangular mainframe while maintaining a distance between the substrates bounded by the first pitch throughout a retraction process, and fold the first end effector and the second end effector inward within a sweep diameter defined by a width of the rectangular mainframe.Type: ApplicationFiled: October 19, 2022Publication date: April 27, 2023Inventors: Rajkumar Thanu, Jeffrey C. Hudgens, Damon K. Cox, Matvey Farber
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Patent number: 11626305Abstract: A robotic object handling system comprises a robot arm, a non-contact sensor, a first station, and a computing device. The computing device is to cause the robot arm to pick up an object on an end effector, cause the robot arm to position the object within a detection area of the non-contact sensor, cause the non-contact sensor to generate sensor data of the object, determine at least one of a rotational error of the object relative to a target orientation or a positional error of the object relative to a target position based on the sensor data, cause an adjustment to the robot arm to approximately remove at least one of the rotational error or the positional error from the object, and cause the robot arm to place the object at the first station, wherein the placed object lacks at least one of the rotational error or the positional error.Type: GrantFiled: June 25, 2019Date of Patent: April 11, 2023Assignee: Applied Materials, Inc.Inventors: Nicholas Michael Kopec, Damon K. Cox, Leon Volfovski
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Publication number: 20220388158Abstract: Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.Type: ApplicationFiled: August 12, 2022Publication date: December 8, 2022Inventors: Jeff Hudgens, Damon K. Cox, Rajkumar Thanu
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Patent number: 11413744Abstract: Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.Type: GrantFiled: March 3, 2020Date of Patent: August 16, 2022Assignee: Applied Materials, Inc.Inventors: Jeff Hudgens, Damon K. Cox, Rajkumar Thanu
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Publication number: 20220088803Abstract: A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.Type: ApplicationFiled: September 23, 2020Publication date: March 24, 2022Inventors: Alexander Berger, Paul Lawrence Korff, William Paul Laceky, Jeffrey C. Hudgens, Rajkumar Thanu, Damon K. Cox, Matvey Farber
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Publication number: 20210291374Abstract: A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.Type: ApplicationFiled: April 28, 2020Publication date: September 23, 2021Inventors: Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
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Publication number: 20210291375Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.Type: ApplicationFiled: April 28, 2020Publication date: September 23, 2021Inventors: Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
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Publication number: 20210292104Abstract: A carrier includes a rigid body forming a plurality of openings and a plurality of fasteners configured to removably attach to the rigid body via the plurality of openings. A first set of fingers is configured to be removably attached to the rigid body via the plurality of fasteners and the plurality of openings. The first set of fingers is configured to support first content during first transportation of the carrier within a substrate processing system. A second set of fingers is configured to be removably attached to the rigid body via the plurality of fasteners and the plurality of openings. The second set of fingers is configured to support second content during second transportation of the carrier within the substrate processing system.Type: ApplicationFiled: March 18, 2021Publication date: September 23, 2021Inventors: Aaron Green, Nicholas Michael Bergantz, Damon K. Cox, Andreas Schmid