Patents by Inventor Damon Tyrone Genetti
Damon Tyrone Genetti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230047039Abstract: A system includes a robot configured to transfer either one of a substrate and an edge ring within a substrate processing system, a substrate aligner configured to adjust a rotational position of either one of the substrate or the edge ring relative to an end effector of the robot, and a carrier plate configured to support the edge ring. The robot is configured to retrieve the carrier plate with the end effector, retrieve the edge ring using the carrier plate supported on the end effector, and transfer the carrier plate and the edge ring to the substrate aligner.Type: ApplicationFiled: January 20, 2021Publication date: February 16, 2023Inventors: Damon Tyrone GENETTI, Darryl ANGELO, Richard H. GOULD, Roy Scott POWELL
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Publication number: 20220246408Abstract: A ring storage station used for delivering a consumable part to a substrate processing system includes a housing that includes a base plate and a rotating plate disposed over the base plate. An end-effector opening is disposed at a first side of the housing and a service window opening is disposed at a second side of the housing. A set of finger support structures is connected to the rotating plate. Each finger support structure includes a support column and support fingers disposed thereon. At least two of the set of columns have support fingers with index pins to radially align consumable parts when disposed in the ring storage station. In one configuration, consumable parts may be designed to match the rotation angle engagement to ensure catching the angle alignment between ring storage and process module.Type: ApplicationFiled: May 8, 2020Publication date: August 4, 2022Inventors: Damon Tyrone Genetti, Roy Scott Powell, Darryl Angelo, Hui Ling Han
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Patent number: 10790237Abstract: Each sensor in an array of sensors detects and signals when an edge of a wafer passes by the sensor on a wafer handling component of a robot. A number (N) of detected wafer edge locations is determined. Each detected wafer edge location is a set of coordinates (x, y) in a coordinate system of the wafer handling component. For each unique set of (N?1) of the number (N) of detected wafer edge locations, an estimated wafer offset is determined that substantially minimizes a performance index value. The estimated wafer offset is a vector extending from a center of the coordinate system of the wafer handling component to an estimated center location of the wafer. A final wafer offset is identified as the estimated wafer offset that has a smallest corresponding performance index value. The final wafer offset is used to center the wafer at a target station.Type: GrantFiled: September 14, 2018Date of Patent: September 29, 2020Assignee: Lam Research CorporationInventors: Benjamin W. Mooring, Damon Tyrone Genetti
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Patent number: 10770339Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module.Type: GrantFiled: April 29, 2019Date of Patent: September 8, 2020Assignee: Lam Research CorporationInventors: Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo
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Publication number: 20200091085Abstract: Each sensor in an array of sensors detects and signals when an edge of a wafer passes by the sensor on a wafer handling component of a robot. A number (N) of detected wafer edge locations is determined. Each detected wafer edge location is a set of coordinates (x, y) in a coordinate system of the wafer handling component. For each unique set of (N?1) of the number (N) of detected wafer edge locations, an estimated wafer offset is determined that substantially minimizes a performance index value. The estimated wafer offset is a vector extending from a center of the coordinate system of the wafer handling component to an estimated center location of the wafer. A final wafer offset is identified as the estimated wafer offset that has a smallest corresponding performance index value. The final wafer offset is used to center the wafer at a target station.Type: ApplicationFiled: September 14, 2018Publication date: March 19, 2020Inventors: Benjamin W. Mooring, Damon Tyrone Genetti
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Patent number: 10541168Abstract: A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and determine a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support. An edge ring position module configured to determine a centered position of the edge ring relative to the substrate support based on offsets between the plurality of first positions and the plurality of second positions.Type: GrantFiled: October 31, 2017Date of Patent: January 21, 2020Assignee: LAM RESEARCH CORPORATIONInventors: Ali Sucipto Tan, Haoquan Yan, Marc Estoque, Damon Tyrone Genetti, Jon McChesney, Alexander Miller Paterson
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Patent number: 10427307Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module.Type: GrantFiled: August 2, 2017Date of Patent: October 1, 2019Assignee: Lam Research CorporationInventors: Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo
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Publication number: 20190252234Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module.Type: ApplicationFiled: April 29, 2019Publication date: August 15, 2019Inventors: Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo
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Patent number: 10304717Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module.Type: GrantFiled: August 3, 2017Date of Patent: May 28, 2019Assignee: Lam Research CorporationInventors: Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo
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Patent number: 10190865Abstract: Methods, kits, systems, and apparatuses, for measuring and/or verifying end effector flatness using electrical continuity are provided.Type: GrantFiled: March 31, 2016Date of Patent: January 29, 2019Assignee: Lam Research CorporationInventors: Silvia Rocio Aguilar Amaya, Derek John Witkowicki, Damon Tyrone Genetti
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Patent number: 10124492Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module.Type: GrantFiled: February 19, 2016Date of Patent: November 13, 2018Assignee: Lam Research CorporationInventors: Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo
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Patent number: 10062599Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module.Type: GrantFiled: February 19, 2016Date of Patent: August 28, 2018Assignee: Lam Research CorporationInventors: Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo
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Patent number: 10062590Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.Type: GrantFiled: August 14, 2017Date of Patent: August 28, 2018Assignee: Lam Research CorporationInventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
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Patent number: 10062589Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.Type: GrantFiled: August 9, 2017Date of Patent: August 28, 2018Assignee: Lam Research CorporationInventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
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Publication number: 20180138069Abstract: A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and determine a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support. An edge ring position module configured to determine a centered position of the edge ring relative to the substrate support based on offsets between the plurality of first positions and the plurality of second positions.Type: ApplicationFiled: October 31, 2017Publication date: May 17, 2018Inventors: Ali Sucipto Tan, Haoquan Yan, Marc Estoque, Damon Tyrone Genetti, Jon McChesney, Alexander Miller Paterson
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Publication number: 20180068879Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.Type: ApplicationFiled: August 14, 2017Publication date: March 8, 2018Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
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Publication number: 20180040492Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.Type: ApplicationFiled: August 14, 2017Publication date: February 8, 2018Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
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Patent number: 9881820Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.Type: GrantFiled: April 25, 2016Date of Patent: January 30, 2018Assignee: Lam Research CorporationInventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
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Publication number: 20180019142Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.Type: ApplicationFiled: August 9, 2017Publication date: January 18, 2018Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
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Publication number: 20170334074Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module.Type: ApplicationFiled: August 2, 2017Publication date: November 23, 2017Inventors: Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo