Patents by Inventor Dan Georgesco

Dan Georgesco has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for preparing a sample for thin film analysis
    Patent number: 7190441
    Abstract: Methods and systems for preparing a sample for thin film analysis are provided. One system includes an energy beam source configured to generate an energy beam. The system also includes an energy beam delivery subsystem configured to direct the energy beam to a sample and to modify the energy beam such that the energy beam has a substantially flat-top profile on the sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample. One method includes generating an energy beam and modifying the energy beam such that the energy beam has a substantially flat-top profile. The method also includes directing the energy beam to a sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: March 13, 2007
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: James T. McWhirter, Liang-Guo Wang, Hidong Kwak, Haixing Zou, Dan Georgesco, Bernard Lautee, Jennming James Chen, Gary R. Janik, Patrick M. Maxton