Patents by Inventor Dan Gura

Dan Gura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS INJECTION COMPONENTS FOR DEPOSITION SYSTEMS AND RELATED METHODS
    Publication number: 20150167161
    Abstract: A gas injector includes a base plate, a middle plate, and a top plate. The base plate, middle plate, and top plate are configured to flow a purge gas between the base plate and the middle plate and to flow a precursor gas between the middle plate and the top plate. Another gas injector includes a precursor gas inlet, a lateral precursor gas flow channel, and a plurality of precursor gas flow channels. The plurality of precursor gas flow channels extend from the at least one lateral precursor gas flow channel to an outlet of the gas injector. Methods of forming a material on a substrate include flowing a precursor between a middle plate and a top plate of a gas injector and flowing a purge gas between a base plate and the middle plate of the gas injector.
    Type: Application
    Filed: May 24, 2013
    Publication date: June 18, 2015
    Applicant: Soitec
    Inventors: Claudio Canizares, Dan Gura, Ronald Thomas Bertram, JR.