Patents by Inventor Dan Joseph Healy

Dan Joseph Healy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for monitoring a flow controller coupled to a process chamber
    Patent number: 10222810
    Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: March 5, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Balarabe N. Mohammed, John W. Lane, Mariusch J. Gregor, Dan Joseph Healy
  • METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER
    Publication number: 20180024573
    Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.
    Type: Application
    Filed: August 28, 2017
    Publication date: January 25, 2018
    Inventors: BALARABE N. MOHAMMED, JOHN W. LANE, MARIUSCH J. GREGOR, DAN JOSEPH HEALY
  • Methods for monitoring a flow controller coupled to a process chamber
    Patent number: 9772629
    Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: September 26, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Balarabe N. Mohammed, John W. Lane, Mariusch J. Gregor, Dan Joseph Healy
  • Methods for in-situ calibration of a flow controller
    Patent number: 9644796
    Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: May 9, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Balarabe N. Mohammed, John W. Lane, Mariusch J. Gregor, Dan Joseph Healy