Patents by Inventor Dan R. Fleming

Dan R. Fleming has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coordinated cluster tool energy delivery system
    Patent number: 5784238
    Abstract: A coordinated cluster-tool energy distribution system provides a systems level approach to supplying all process energy needs for such industrial applications as those found in the semiconductor manufacturing industry, e.g. a single-wafer or multiple chamber processing chamber. The system is preferably provided as an integrated whole, rather than as a piece-meal collection of various energy distribution elements.
    Type: Grant
    Filed: August 1, 1996
    Date of Patent: July 21, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Eric A. Nering, Dan R. Fleming