Patents by Inventor Dan R. Geshell

Dan R. Geshell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for passivating a processing chamber
    Patent number: 7524383
    Abstract: A method and system for passivating a processing chamber is provided, whereby the processing chamber is exposed to one or more cycles of citric acid, or nitric acid. The processing chamber is fabricated, for example, from stainless steel. Each cycle may be performed at a pressure greater than atmospheric pressure, or a temperature greater than 20 degrees centigrade, or both.
    Type: Grant
    Filed: May 25, 2005
    Date of Patent: April 28, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Wayne M. Parent, Dan R. Geshell