Abstract: Apparatus for processing a substrate are provided herein. In some embodiments, a lid for a substrate processing chamber includes: a lid plate comprising an upper surface and a contoured bottom surface, the upper surface having a central opening and the contoured bottom surface having a first portion that extends downwardly and outwardly from the central opening to a peripheral portion of the lid plate and a second portion that extends radially outward along the peripheral portion of the lid plate; an upper flange extending radially outward from the lid plate; and one or more channels formed through the lid plate from the upper surface of the lid plate to the second portion of the contoured bottom surface.

Abstract: Methods and apparatus for processing a substrate are provided herein. In some embodiments, a substrate processing chamber includes: a chamber body; a chamber lid assembly having a housing enclosing a central channel that extends along a central axis and has an upper portion and a lower portion; a lid plate coupled to the housing and having a contoured bottom surface that extends downwardly and outwardly from a central opening coupled to the lower portion of the central channel to a peripheral portion of the lid plate; and a gas distribution plate disposed below the lid plate and having a plurality of apertures disposed through the gas distribution plate.

Abstract: The invention is directed to a female-female syringe adapter, related systems, and methods of using the female-female adapter. The female-female syringe adapter may be used with male nozzles of syringes and reconstitution devices when reconstituting a lyophilized powder. The female-female adapter also may be used to combine doses in a common syringe from mixed reconstitution products in a multi-chambered syringe.

Abstract: Apparatus for processing a substrate are provided herein. In some embodiments, a lid for a substrate processing chamber includes: a lid plate comprising an upper surface and a contoured bottom surface, the upper surface having a central opening and the contoured bottom surface having a first portion that extends downwardly and outwardly from the central opening to a peripheral portion of the lid plate and a second portion that extends radially outward along the peripheral portion of the lid plate; an upper flange extending radially outward from the lid plate; and one or more channels formed through the lid plate from the upper surface of the lid plate to the second portion of the contoured bottom surface.

Abstract: Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.

Abstract: Showerheads and process chambers incorporating same are provided herein. In some embodiments, a showerhead includes a body having a central portion and an outer portion, wherein the outer portion includes an annular wall extending upward from the central portion and a flange extending radially outward from the annular wall; a plurality of apertures disposed through the central portion; an annular stepped portion disposed radially outward of outermost ones of the plurality of apertures and radially inward of the outer portion; a plurality of positioning features arranged about a central axis of the showerhead and formed in a periphery of the outer portion; and a plurality of coupling features arranged about the central axis and formed in the periphery of the outer portion.

Abstract: Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.

Abstract: Methods and apparatus for processing a substrate are provided herein. In some embodiments, a substrate processing chamber includes: a chamber body; a chamber lid assembly having a housing enclosing a central channel that extends along a central axis and has an upper portion and a lower portion; a lid plate coupled to the housing and having a contoured bottom surface that extends downwardly and outwardly from a central opening coupled to the lower portion of the central channel to a peripheral portion of the lid plate; and a gas distribution plate disposed below the lid plate and having a plurality of apertures disposed through the gas distribution plate.

Abstract: A pivot port that can provide a pivot point for a surgical instrument. The pivot port may be held in a stationary position by a support arm assembly that is attached to a table. The pivot port may include either an adapter or a ball joint that can support the surgical instrument. The pivot port allows the instrument to pivot relative to a patient.

Abstract: A handle used to control movement of a medical instrument. The medical instrument may be coupled to a robotic arm that is connected to a controller. The medical instrument may have a plurality of functions such as wrist locking and motion scaling. One of the functions may be selected through a graphical user interface operated by the end user. The handle may have a plurality of buttons. One of the buttons may allow the end user to control the selected function. For example, when wrist locking/unlocking is selected, depressing the button can toggle the medical instrument wrist between a locked state and an unlocked state.

Abstract: A robotically controlled endoscopic medical instrument that includes an end effector coupled to a wrist. The wrist provides two separate degrees of freedom about the same pivot point. The end effector can be moved and actuated by pins. The pins allow for a compact minimally invasive medical instrument that has a wrist with two degrees of freedom.

Abstract: A pivot port that can provide a pivot point for a surgical instrument. The pivot port may be held in a stationary position by a support arm assembly that is attached to a table. The pivot port may include either an adapter or a ball joint that can support the surgical instrument. The pivot port allows the instrument to pivot relative to a patient.

Abstract: A pivot port that can provide a pivot point for a surgical instrument. The pivot port may be held in a stationary position by a support arm assembly that is attached to a table. The pivot port may include either an adapter or a ball joint that can support the surgical instrument. The pivot port allows the instrument to pivot relative to a patient.

Abstract: A handle used to control movement of a medical instrument. The medical instrument may be coupled to a robotic aim that is connected to a controller. The medical instrument may have a plurality of functions such as wrist locking and motion scaling. One of the functions may be selected through a graphical user interface operated by the end user. The handle may have a plurality of buttons. One of the buttons may allow the end user to control the selected function. For example, when wrist locking/unlocking is selected, depressing the button can toggle the medical instrument wrist between a locked state and an unlocked state.

Abstract: A handle used to control movement of a medical instrument. The medical instrument may be coupled to a robotic arm that is connected to a controller. The medical instrument may have a plurality of functions such as wrist locking and motion scaling. One of the functions may be selected through a graphical user interface operated by the end user. The handle may have a plurality of buttons. One of the buttons may allow the end user to control the selected function. For example, when wrist locking/unlocking is selected, depressing the button can toggle the medical instrument wrist between a locked state and an unlocked state.

Abstract: A robotically controlled endoscopic medical instrument that includes an end effector coupled to a wrist. The wrist provides two separate degrees of freedom about the same pivot point. The end effector can be moved and actuated by pins. The pins allow for a compact minimally invasive medical instrument that has a wrist with two degrees of freedom.

Abstract: A pivot port that can provide a pivot point for a surgical instrument. The pivot port may be held in a stationary position by a support arm assembly that is attached to a table. The pivot port may include either an adapter or a ball joint that can support the surgical instrument. The pivot port allows the instrument to pivot relative to a patient.

Abstract: A robotically controlled endoscopic medical instrument that includes an end effector coupled to a wrist. The wrist provides two separate degrees of freedom about the same pivot point. The end effector can be moved and actuated by pins. The pins allow for a compact minimally invasive medical instrument that has a wrist with two degrees of freedom.

Abstract: A medical robotic system with a handle assembly that is used to control a medical instrument. The handle assembly and medical instrument have five degrees of freedom. Five degrees of freedom may provide greater dexterity than medical robotic systems of the prior art with four or less degrees of freedom. Five degrees of freedom reduces the size and complexity of the instrument.

Abstract: A support arm for a heart stabilizer that can be used to stabilize a heart during a beating heart coronary artery bypass graft procedure. The support arm may have an arm that is coupled to a table mount and an end effector. The table mount is adapted to be mounted to the rail of a surgical table. The end effector is adapted to hold the heart stabilizer. The arm may be adjustable to allow an end user to adjust the position of the end effector.