Patents by Inventor Dan Trojan

Dan Trojan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing apparatus and method
    Patent number: 6045716
    Abstract: Technique including a method 400 and an apparatus 100 for chemical mechanical polishing using a plurality of carrier devices 123 rotatably coupled to a turret means. The apparatus 100 includes a turret and plurality of rotatable polishing surfaces 111 positioned around the turret. The apparatus also includes a plurality of carrier devices 123 rotatably coupled to the turret, where the carrier devices 123 are each adapted to hold a workpiece to be polished on at least one of the rotatable polishing surfaces. Each of the carrier devices is operably independently to each other during a process for chemical mechanical polishing.
    Type: Grant
    Filed: July 15, 1997
    Date of Patent: April 4, 2000
    Assignee: Strasbaugh
    Inventors: Thomas Walsh, Dan Trojan