Patents by Inventor Dana Patelzick

Dana Patelzick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Capacitive distance sensing in semiconductor processing tools
    Publication number: 20070222462
    Abstract: A wireless sensor includes at least one capacitive plate for sensing a distance relative to an object of interest within a semiconductor-processing environment. The sensor includes an internal power source and wireless communication such that distance and/or parallelism measurements effected using the capacitive plate(s) can be provided wirelessly to an external device.
    Type: Application
    Filed: February 20, 2007
    Publication date: September 27, 2007
    Inventors: DelRae Gardner, Craig Ramsey, Dana Patelzick