Patents by Inventor Dane H. Anderberg

Dane H. Anderberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making a quartz dome reactor chamber
    Patent number: 5573566
    Abstract: A method of making a quartz dome for a reactor chamber from a substantially flat quartz disk. The quartz disk is placed on a graphite ring which is rotated. The quartz disk is heated until the disk is softened slightly and it begins to slump. The softened portion of the disk is drawn by a change in pressure to contact a fixed wiper blade. The wiper blade controls the size and shape of the deformation of the quartz disk to form the dome surface.
    Type: Grant
    Filed: May 26, 1995
    Date of Patent: November 12, 1996
    Assignee: Advanced Semiconductor Materials America, Inc.
    Inventors: Dane H. Anderberg, Lewis C. Barnett