Patents by Inventor Daniel A. Hall
Daniel A. Hall has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250095952Abstract: An ion implanter, including an ion source generating an ion beam, a set of beamline components directing the ion beam to a substrate along a beam axis, normal to a reference plane, a process chamber housing the substrate to receive the ion beam, and a conoscopy system. The conoscopy system may include: an illumination source directing light to a substrate position, a first polarizer assembly, comprising a first polarizer element and first pair of lenses, disposed on opposite sides of the first polarizer element, and arranged to focus the light at the substrate position; a second polarizer assembly, disposed to receive the light after passing through the substrate position, including a second polarizer element and a second pair of lenses disposed on opposite sides of the second polarizer element, and arranged to focus the light at a sensor, disposed in a detector plane of a detector.Type: ApplicationFiled: August 5, 2024Publication date: March 20, 2025Applicant: Applied Materials, Inc.Inventors: Ori Noked, Daniel A. Hall, Frank Sinclair, Timothy Thomas, Samuel Charles Howells, Douglas E. Holmgren
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Patent number: 11121017Abstract: A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.Type: GrantFiled: August 29, 2014Date of Patent: September 14, 2021Assignee: BROOKS AUTOMATION, INC.Inventors: Daniel A. Hall, Glenn L. Sindledecker, Matthew W. Coady, Marcello Trolio, Michael Spinazola
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Publication number: 20200381271Abstract: A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes.Type: ApplicationFiled: September 4, 2019Publication date: December 3, 2020Applicant: APPLIED Materials, Inc.Inventors: Dawei Sun, Dale K. Stone, D. Jeffrey Lischer, Lyudmila Stone, Steven Anella, Julian G. Blake, Ron Serisky, Daniel A. Hall, Robert H. Bettencourt
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Patent number: 10625303Abstract: A corn cob harvesting machine includes a tractor, cob harvester, and trailer that together lift, clean, and separate corn cobs from a corn harvester combine chaff windrow. The cob harvester has a floating cob lift immediately adjacent to and through various skirts engaging the earth that is supported by and floats with respect to a support frame. The floating cob lift has a rotary paddle that lifts and throws cobs into the first cross draft separator. The first cross draft separator has a blower that generates a vacuum within the floating cob lift. An adjustable flap intermediate between rotary paddle and blower deflects cobs and other heavier matter out of the air stream, while lighter matter is removed. A first cross draft separator removes chaff, a rock trap separates rocks, and a second cross draft separator removes additional chaff. A discharge conveyor transfers cleaned corn cobs to the trailer.Type: GrantFiled: March 8, 2018Date of Patent: April 21, 2020Inventors: Michael E. Hall, Daniel A. Hall
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Patent number: 9108322Abstract: A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.Type: GrantFiled: June 14, 2013Date of Patent: August 18, 2015Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Robert A. Poitras, Steven M. Anella, Daniel A. Hall, Scott C. Holden, Roger B. Fish
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Publication number: 20140369793Abstract: A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.Type: ApplicationFiled: August 29, 2014Publication date: December 18, 2014Inventors: Daniel A. Hall, Glenn L. Sindledecker, Matthew W. Coady, Marcello Trolio, Michael Spinazola
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Publication number: 20140324221Abstract: A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.Type: ApplicationFiled: June 14, 2013Publication date: October 30, 2014Inventors: Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Robert A. Poitras, Steven M. Anella, Daniel A. Hall, Scott C. Holden, Roger B. Fish
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Patent number: 8821099Abstract: A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.Type: GrantFiled: July 11, 2005Date of Patent: September 2, 2014Assignee: Brooks Automation, Inc.Inventors: Daniel A. Hall, Glenn L. Sindledecker, Matthew W. Coady, Marcello Trolio, Michael Spinazola
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Patent number: 8182192Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.Type: GrantFiled: July 26, 2010Date of Patent: May 22, 2012Assignee: Brooks Automation, Inc.Inventors: Daniel A. Hall, Christopher Hofmeister, William Fosnight, Jeff G. Araujo, Steven Allen, Glenn Sindledecker
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Publication number: 20110014016Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.Type: ApplicationFiled: July 26, 2010Publication date: January 20, 2011Applicant: BROOKS AUTOMATION, INC.Inventors: Daniel A. Hall, Christopher Hofmeister, William Fosnight, Jeff G. Araujo, Steven Allen, Glenn Sindledecker
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Patent number: 7762755Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.Type: GrantFiled: July 11, 2006Date of Patent: July 27, 2010Assignee: Brooks Automation, Inc.Inventors: Daniel A. Hall, Christopher Hofmeister, William Fosnight, Jeff G. Araujo, Steven Allen, Glenn Sindledecker
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Patent number: 7607879Abstract: A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus.Type: GrantFiled: June 15, 2005Date of Patent: October 27, 2009Assignee: Brooks Automation, Inc.Inventors: Daniel A. Hall, Christopher Hofmeister, William Fosnight, Robert T. Caveney, Ulysses Gilchrist, Jeff G. Araujo
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Publication number: 20030225120Abstract: This invention relates to novel dihydropyridine soft drugs of the formula &PHgr;OOR1, where &PHgr; is a dihydropyridine moiety. These compounds are useful as calcium channel antagonists with cardiovascular, antiasthmatic and antibroncho-constriction activity. Use of such soft drug analogs permits the administration of greater doses of the claimed dihydropyridine compounds without intolerable systemic effects. Thus, this invention also provides pharmaceutical compositions, as well as methods, for preventing and treating disorders such as hypersensitivity, allergy, asthma, bronchospasm, dysmenorrhea, esophageal spasm, glaucoma, premature labor, urinary tract disorders, gastrointestinal motility disorders and cardiovascular disorders, while avoiding unwanted systemic effects.Type: ApplicationFiled: March 19, 2003Publication date: December 4, 2003Inventors: John H. Dodd, James L. Bullington, Daniel A. Hall, James R. Henry, Kenneth C. Rupert
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Patent number: 6562824Abstract: This invention relates to novel dihydropyridine soft drugs of the formula &PHgr;OOR1, where &PHgr; is a dihydropyridine moiety. These compounds are useful as calcium channel antagonists with cardiovascular, antiasthmatic and antibroncho-constriction activity. Use of such soft drug analogs permits the administration of greater doses of the claimed dihydropyridine compounds without intolerable systemic effects. Thus, this invention also provides pharmaceutical compositions, as well as methods, for preventing and treating disorders such as hypersensitivity, allergy, asthma, bronchospasim, dysmenorrhea, esophageal spasm, glaucoma, premature labor, urinary tract disorders, gastrointestinal motility disorders and cardiovascular disorders, while avoiding unwanted systemic effects.Type: GrantFiled: May 2, 2001Date of Patent: May 13, 2003Assignee: Ortho-McNeil Pharmaceutical, Inc.Inventors: John H. Dodd, James L. Bullington, Daniel A. Hall, James R. Henry, Kenneth C. Rupert
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Patent number: 6476022Abstract: This invention provides novel oxathiepino[6,5-b]dihydropyridines. These compounds are useful as calcium channel antagonists with cardiovascular, antiasthmatic and antibronchoconstriction activity. Thus, this invention also provides pharmaceutical compositions, as well as methods, for preventing and treating disorders such as hypersensitivity, allergy, asthma, bronchospasm, dysmenorrhea, esophageal spasm, glaucoma, premature labor, urinary tract disorders, gastrointestinal motility disorders and cardiovascular disorders.Type: GrantFiled: June 23, 2000Date of Patent: November 5, 2002Assignee: Ortho-McNeil Pharmaceutical, Inc.Inventors: John H. Dodd, James R. Henry, Kenneth C. Rupert, James L. Bullington, Daniel A. Hall
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Patent number: 6472530Abstract: This invention provides novel dithiepino[6,5-b]pyridines of the following formulae: These compounds are useful as calcium channel antagonists with cardiovascular, antiasthmatic and antibronchoconstriction activity. Thus, this invention also provides pharmaceutical compositions, as well as methods, for preventing and treating disorders such as hypersensitivity, allergy, asthma, bronchospasm, dysmenorrhea, esophageal spasm, glaucoma, premature labor, urinary tract disorders, gastrointestinal motility disorders and cardiovascular disorders.Type: GrantFiled: September 1, 2000Date of Patent: October 29, 2002Assignee: Ortho-McNeil Pharmaceutical, Inc.Inventors: John H. Dodd, Kenneth C. Rupert, James L. Bullington, Daniel A. Hall
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Publication number: 20020133018Abstract: This invention relates to novel dihydropyridine soft drugs of the formula &PHgr;OOR1, where &PHgr; is a dihydropyridine moiety. These compounds are useful as calcium channel antagonists with cardiovascular, antiasthmatic and antibroncho-constriction activity. Use of such soft drug analogs permits the administration of greater doses of the claimed dihydropyridine compounds without intolerable systemic effects. Thus, this invention also provides pharmaceutical compositions, as well as methods, for preventing and treating disorders such as hypersensitivity, allergy, asthma, bronchospasim, dysmenorrhea, esophageal spasm, glaucoma, premature labor, urinary tract disorders, gastrointestinal motility disorders and cardiovascular disorders, while avoiding unwanted systemic effects.Type: ApplicationFiled: May 2, 2001Publication date: September 19, 2002Inventors: John H. Dodd, James L. Bullington, Daniel A. Hall, James R. Henry, Kenneth C. Rupert
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Publication number: 20020103376Abstract: This invention provides novel dithiepino[6,5-b]pyridines of the following formulae.Type: ApplicationFiled: May 7, 2001Publication date: August 1, 2002Inventors: James L. Bullington, John H. Dodd, Daniel A. Hall
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Patent number: 6410552Abstract: This invention provides novel benzoethers of the following formulae: These compounds are useful as calcium channel antagonists with cardiovascular, antiasthmatic and antibronchoconstriction activity. Thus, this invention also provides pharmaceutical compositions, as well as methods, for preventing and treating disorders such as hypersensitivity, allergy, asthma, bronchospasm, dysmenorrhea, esophageal spasm, glaucoma, premature labor, urinary tract disorders, gastrointestinal motility disorders and cardiovascular disorders.Type: GrantFiled: December 28, 2000Date of Patent: June 25, 2002Assignee: Ortho-McNeil Pharmaceutical, Inc.Inventors: John H. Dodd, James R. Henry, Kenneth C. Rupert, James L. Bullington, Daniel A. Hall
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Patent number: 6410553Abstract: This invention provides novel benzosulfones of the following formulae: These compounds are useful as calcium channel antagonists with cardiovascular, antiasthmatic and antibronchoconstriction activity. Thus, this invention also provides pharmaceutical compositions, as well as methods, for preventing and treating disorders such as hypersensitivity, allergy, asthma, bronchospasm, dysmenorrhea, esophageal spasm, glaucoma, premature labor, urinary tract disorders, gastrointestinal motility disorders and cardiovascular disorders.Type: GrantFiled: December 28, 2000Date of Patent: June 25, 2002Assignee: Ortho-McNeil Pharmaceutical, Inc.Inventors: John H. Dodd, Kenneth C. Rupert, James L. Bullington, Daniel A. Hall