Abstract: A digital-to-analog converter includes a plurality of electrically programmable floating gate transistors, each having a electrically programmable threshold voltage. Each of the transistors has its source coupled to ground, its control gate coupled to an output node, and its drain coupled to the output node via one of a plurality of switching circuits. The output node is coupled to a voltage source via a load circuit. An input circuit decodes a digital input signal to selectively generate one of a plurality of control signals at a time in accordance with the digital input signal. Each of the control signals is for one of the switching circuits. When a transistor is coupled to the output node, the voltage level of the output node is equal to the threshold voltage of that transistor. An analog-to-digital converter includes a plurality of electrically programmable floating gate transistors, each having a electrically programmable threshold voltage.

Abstract: A method of forming a patterned resist layer on a semiconductor substrate is described. The substrate is coated with a resist layer and placed on a substrate stage in a lithographic printer. The lithographic printer includes a pulsed radiation source that emits a radiation pulse lasting a pulse time and has a recovery time between two consecutive radiation pulses. The printer has a reticle disposed between the radiation source and the resist layer. The substrate is aligned to the reticle. A stepping field of the resist layer is patterned using a plurality of radiation pulses during multiple passes of the reticle over the stepping field. The substrate moves relative to the reticle at a predetermined velocity during each of the radiation pulses. The substrate motion relative to the reticle is configured so that the radiation source emits a radiation pulse when the center of the reticle is over about the center of the stepping field.