Patents by Inventor Daniel Bosák

Daniel Bosák has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Specimen preparation and inspection in a dual-beam charged particle microscope
    Patent number: 10629409
    Abstract: A method of preparing a specimen in a dual-beam charged particle microscope having: an ion beam column, that can produce an ion beam that propagates along an ion axis; an electron beam column, that can produce an electron beam that propagates along an electron axis, comprising the following steps: Providing a precursor sample on a sample holder; Using said ion beam to cut a furrow around a selected portion of said sample; Attaching a manipulator needle to said portion, severing said portion from the rest of said sample, and using the needle to perform a lift-out of the portion away from the rest of the sample, particularly comprising: Configuring the manipulator needle to have multiple degrees of motional freedom, comprising at least: Eucentric tilt ? about a tilt axis that passes through an intersection point of said ion and electron axes and is perpendicular to said electron axis; Rotation ? about a longitudinal axis of the needle; Whilst maintaining said portion on said needle, using said ion bea
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: April 21, 2020
    Assignee: FEI Company
    Inventors: Frantisek Vaske, Tomáŝ Vystavêl, Daniel Bosák
  • SPECIMEN PREPARATION AND INSPECTION IN A DUAL-BEAM CHARGED PARTICLE MICROSCOPE
    Publication number: 20190108971
    Abstract: A method of preparing a specimen in a dual-beam charged particle microscope having: an ion beam column, that can produce an ion beam that propagates along an ion axis; an electron beam column, that can produce an electron beam that propagates along an electron axis, comprising the following steps: Providing a precursor sample on a sample holder; Using said ion beam to cut a furrow around a selected portion of said sample; Attaching a manipulator needle to said portion, severing said portion from the rest of said sample, and using the needle to perform a lift-out of the portion away from the rest of the sample, particularly comprising: Configuring the manipulator needle to have multiple degrees of motional freedom, comprising at least: Eucentric tilt a about a tilt axis that passes through an intersection point of said ion and electron axes and is perpendicular to said electron axis; Rotation ? about a longitudinal axis of the needle; Whilst maintaining said portion on said needle, using said ion beam
    Type: Application
    Filed: July 16, 2018
    Publication date: April 11, 2019
    Inventors: Frantisek Vaske, Tomás Vystavêl, Daniel Bosák