Patents by Inventor Daniel Bui

Daniel Bui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF ELIMINATING THERMALLY INDUCED BEAM DRIFT IN AN ELECTRON BEAM SEPARATOR
    Publication number: 20190228944
    Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.
    Type: Application
    Filed: May 15, 2018
    Publication date: July 25, 2019
    Inventors: Sameet K. Shriyan, Oscar Florendo, Joseph Maurino, Daniel Bui
  • Method of eliminating thermally induced beam drift in an electron beam separator
    Patent number: 10340114
    Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.
    Type: Grant
    Filed: May 15, 2018
    Date of Patent: July 2, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Sameet K Shriyan, Oscar Florendo, Joseph Maurino, Daniel Bui
  • Extractor electrode for electron source
    Patent number: 9934933
    Abstract: Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.
    Type: Grant
    Filed: May 12, 2017
    Date of Patent: April 3, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Laurence S. Hordon, Nikolai Chubun, Luca Grella, Xinrong Jiang, Daniel Bui, Kevin Cummings, Christopher Sears, Oscar G. Florendo