Patents by Inventor Daniel Burgstaller
Daniel Burgstaller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10272660Abstract: A flexible carrier mount for mounting of a carrier substrate when the carrier substrate is detached from a product substrate, detachment means being provided for debonding the product substrate with bending of the carrier substrate. A device for detaching a carrier substrate from one product substrate in one detachment direction having: a carrier mount flexible in the detachment direction for mounting the carrier substrate, a substrate mount for mounting the product substrate, and detachment means for debonding the carrier substrate from the product substrate with bending of the carrier substrate. A method for detaching a carrier substrate from a product substrate in one detachment direction with the steps: mounting the product substrate with a substrate mount and mounting the carrier substrate with a carrier mount flexible in the detachment direction and debonding the carrier substrate from the product substrate with bending of the carrier substrate.Type: GrantFiled: September 30, 2015Date of Patent: April 30, 2019Assignee: EV GROUP E. THALLNER GMBHInventors: Jurgen Burggraf, Daniel Burgstaller
-
Patent number: 9449863Abstract: A device for aligning and prefixing a flat substrate on a carrier substrate for the further processing of the substrate. The device includes aligning means for aligning a substrate's outside contour relative to a carrier substrate's outside contour by engaging the substrate's outside contour. The alignment of the substrate is carried out along a substrate plane E that is parallel to a contact surface of the substrate. Attaching means is provided for at least partial prefixing of the aligned substrate on the carrier substrate.Type: GrantFiled: November 10, 2014Date of Patent: September 20, 2016Assignee: EV Group GmbHInventors: Jurgen Burggraf, Friedrich Paul Lindner, Stefan Pargfrieder, Daniel Burgstaller
-
Patent number: 9378996Abstract: This invention relates to a mounting apparatus for mounting and supporting one structure side of a substrate, which structure side has structures thereon. The apparatus having a mounting element with a flat mounting surface for supporting the structures and a suction surface F2 which penetrates the mounting surface solely in an outer ring surface for effecting a fluid flow which produces suctions on the substrate.Type: GrantFiled: August 12, 2011Date of Patent: June 28, 2016Assignee: EV Group W. Thallner GmbHInventors: Werner Thallner, Daniel Burgstaller
-
Patent number: 9296193Abstract: A flexible carrier mount for mounting of a carrier substrate when the carrier substrate is detached from a product substrate, detachment means being provided for debonding the product substrate with bending of the carrier substrate. A device for detaching a carrier substrate from one product substrate in one detachment direction having: a carrier mount flexible in the detachment direction for mounting the carrier substrate, a substrate mount for mounting the product substrate, and detachment means for debonding the carrier substrate from the product substrate with bending of the carrier substrate. A method for detaching a carrier substrate from a product substrate in one detachment direction with the steps: mounting the product substrate with a substrate mount and mounting the carrier substrate with a carrier mount flexible in the detachment direction and debonding the carrier substrate from the product substrate with bending of the carrier substrate.Type: GrantFiled: April 11, 2011Date of Patent: March 29, 2016Assignee: EV Group E. Thallner GmbHInventors: Jürgen Burggraf, Daniel Burgstaller
-
Patent number: 9278433Abstract: A workholding fixture for holding flat semiconductor substrates with a carrier, a holding body which is fixed or which can be fixed on the carrier with a holding side which faces away from the carrier and at least one negative pressure channel which penetrates the holding body with one suction end on the holding side, the holding side having a defined suction structure of soft material.Type: GrantFiled: March 31, 2010Date of Patent: March 8, 2016Assignee: EV GROUP GMBHInventors: Herbert Tiefenböck, Jürgen Burggraf, Stefan Pargfrieder, Daniel Burgstaller
-
Publication number: 20160020124Abstract: A flexible carrier mount for mounting of a carrier substrate when the carrier substrate is detached from a product substrate, detachment means being provided for debonding the product substrate with bending of the carrier substrate. A device for detaching a carrier substrate from one product substrate in one detachment direction having: a carrier mount flexible in the detachment direction for mounting the carrier substrate, a substrate mount for mounting the product substrate, and detachment means for debonding the carrier substrate from the product substrate with bending of the carrier substrate. A method for detaching a carrier substrate from a product substrate in one detachment direction with the steps: mounting the product substrate with a substrate mount and mounting the carrier substrate with a carrier mount flexible in the detachment direction and debonding the carrier substrate from the product substrate with bending of the carrier substrate.Type: ApplicationFiled: September 30, 2015Publication date: January 21, 2016Applicant: EV GROUP E. THALLNER GMBHInventors: Jurgen Burggraf, Daniel Burgstaller
-
Publication number: 20150089783Abstract: A device for aligning and prefixing a flat substrate on a carrier substrate for the further processing of the substrate. The device includes aligning means for aligning a substrate's outside contour relative to a carrier substrate's outside contour by engaging the substrate's outside contour. The alignment of the substrate is carried out along a substrate plane E that is parallel to a contact surface of the substrate. Attaching means is provided for at least partial prefixing of the aligned substrate on the carrier substrate.Type: ApplicationFiled: November 10, 2014Publication date: April 2, 2015Applicant: EV Group GmbHInventors: Jurgen BURGGRAF, Friedrich Paul LINDNER, Stefan PARGFRIEDER, Daniel BURGSTALLER
-
Patent number: 8918989Abstract: A device for aligning and prefixing a flat substrate on a carrier substrate for the further processing of the substrate. The device includes aligning means for aligning a substrate's outside contour relative to a carrier substrate's outside contour by engaging the substrate's outside contour. The alignment of the substrate is carried out along a substrate plane E that is parallel to a contact surface of the substrate. Attaching means is provided for at least partial prefixing of the aligned substrate on the carrier substrate.Type: GrantFiled: March 31, 2010Date of Patent: December 30, 2014Assignee: EV Group GmbHInventors: Jürgen Burggraf, Friedrich Paul Lindner, Stefan Pargfrieder, Daniel Burgstaller
-
Publication number: 20140159321Abstract: This invention relates to a mounting apparatus for mounting and supporting one structure side of a substrate, which structure side has structures thereon. The apparatus having a mounting element with a flat mounting surface for supporting the structures and a suction surface F2 which penetrates the mounting surface solely in an outer ring surface for effecting a fluid flow which produces suctions on the substrate.Type: ApplicationFiled: August 12, 2011Publication date: June 12, 2014Inventors: Werner Thallner, Daniel Burgstaller
-
Publication number: 20140020847Abstract: A flexible carrier mount for mounting of a carrier substrate when the carrier substrate is detached from a product substrate, detachment means being provided for debonding the product substrate with bending of the carrier substrate. A device for detaching a carrier substrate from one product substrate in one detachment direction having: a carrier mount flexible in the detachment direction for mounting the carrier substrate, a substrate mount for mounting the product substrate, and detachment means for debonding the carrier substrate from the product substrate with bending of the carrier substrate. A method for detaching a carrier substrate from a product substrate in one detachment direction with the steps: mounting the product substrate with a substrate mount and mounting the carrier substrate with a carrier mount flexible in the detachment direction and debonding the carrier substrate from the product substrate with bending of the product substrate.Type: ApplicationFiled: April 11, 2011Publication date: January 23, 2014Inventors: Jürgen Burggraf, Daniel Burgstaller
-
Publication number: 20120146273Abstract: A workholding fixture for holding flat semiconductor substrates with a carrier, a holding body which is fixed or which can be fixed on the carrier with a holding side which faces away from the carrier and at least one negative pressure channel which penetrates the holding body with one suction end on the holding side, the holding side having a defined suction structure of soft material.Type: ApplicationFiled: March 31, 2010Publication date: June 14, 2012Inventors: Herbert Tiefenböck, Jürgen Burggraf, Stefan Pargfrieder, Daniel Burgstaller
-
Publication number: 20120110825Abstract: A device for aligning and prefixing a flat substrate on a carrier substrate for the further processing of the substrate, the device having: aligning means for aligning a substrate's outside contour relative to a carrier substrate's outside contour by action on the substrate's outside contour, whereby the orientation along a substrate plane E that is formed with the carrier substrate is carried out by a contact surface of the substrate, and attaching means for at least partial prefixing of the oriented substrate on the carrier substrate.Type: ApplicationFiled: March 31, 2010Publication date: May 10, 2012Inventors: Jürgen Burggraf, Friedrich Paul Lindner, Stefan Pargfrieder, Daniel Burgstaller