Patents by Inventor Daniel Calero

Daniel Calero has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Using an Interferometer as a High Speed Variable Attenuator
    Publication number: 20080106717
    Abstract: A system and method provides high speed variable attenuators. The attenuators can be used within a lithographic apparatus to control intensity of radiation in one or more correction pulses used to correct a dose of the radiation following an initial pulse of radiation.
    Type: Application
    Filed: October 3, 2007
    Publication date: May 8, 2008
    Applicants: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Oscar NOORDMAN, Justin Kreuzer, Henri Vink, Teunis Van Den Dool, Daniel Calero