Patents by Inventor Daniel Chanemougame

Daniel Chanemougame has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210020644
    Abstract: Methods of forming a gate cut isolation for an SRAM include forming a first and second active nanostructures adjacent to each other and separated by a space; forming a sacrificial liner over at least a side of the first active nanostructure facing the space, causing a first distance between a remaining portion of the space and the first active nanostructure to be greater than a second distance between the remaining portion of the space and the second active nanostructure. A gate cut isolation is formed in the remaining portion of the space such that it is closer to the second active nanostructure than the first active nanostructure. The sacrificial liner is removed, and gates formed over the active nanostructures with the gates separated from each other by the gate cut isolation. An SRAM including the gate cut isolation and an IC structure including the SRAM are also included.
    Type: Application
    Filed: July 18, 2019
    Publication date: January 21, 2021
    Inventors: Bipul C. Paul, Ruilong Xie, Julien Frougier, Daniel Chanemougame, Hui Zang
  • Publication number: 20210013111
    Abstract: A method for microfabrication of a three dimensional transistor stack having gate-all-around field-effect transistor devices. The channels hang between source/drain regions. Each channel is selectively deposited with layers of materials designed for adjusting the threshold voltage of the channel. The layers may be oxides, high-k materials, work function materials and metallization. The three dimensional transistor stack forms an array of high threshold voltage devices and low threshold voltage devices in a single package.
    Type: Application
    Filed: July 9, 2020
    Publication date: January 14, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Jeffrey SMITH, Kandabara TAPILY, Lars LIEBMANN, Daniel CHANEMOUGAME, Mark GARDNER, H. Jim FULFORD, Anton J. DEVILLIERS
  • Patent number: 10872962
    Abstract: Fabricating a steep-switch transistor includes receiving a semiconductor structure including a substrate, a fin disposed on the substrate, a plurality of source/drains disposed on the substrate adjacent to the fin, a gate disposed upon the fin, a cap disposed on the gate, and a plurality of trenches, each trench extending to a corresponding one of the plurality of source/drains. A trench contact is formed in each of the trenches in contact with the corresponding source/drain. A recess is formed in a portion of each trench contact below a top surface of the cap. A bi-stable resistive system (BRS) material is deposited in each recess in contact with the portion of the trench contact. A source/drain contact is formed upon the BRS material, a portion of the trench contact, the BRS material, and a portion of the source/drain contact forming a reversible switch for each of the corresponding source/drains.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: December 22, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Julien Frougier, Nicolas Loubet, Ruilong Xie, Daniel Chanemougame, Ali Razavieh, Kangguo Cheng
  • Publication number: 20200381430
    Abstract: A 3D IC includes a substrate having a substrate surface, a first stack of semiconductor devices stacked along a thickness direction of the substrate, and a second stack of semiconductor devices stacked along the thickness direction of the substrate and provided adjacent to the first stack in a direction along the substrate surface. Each semiconductor device of the first and second stack includes a gate and a pair of source-drain regions provided on opposite sides of the respective gate, and each gate of the first and second stack is a split gate. A gate contact is physically connected to a first split gate of a first one of the semiconductor devices. The gate contact forms at least part of a local interconnect structure that electrically connects the first semiconductor device to a second semiconductor device in the 3D IC.
    Type: Application
    Filed: April 15, 2020
    Publication date: December 3, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Lars Liebmann, Jeffrey Smith, Anton deVilliers, Daniel Chanemougame
  • Patent number: 10818792
    Abstract: Structures for a field-effect transistor and methods of forming structures for a field-effect transistor. A layer stack includes nanosheet channel layers arranged to alternate with sacrificial layers. First and second gate structures are formed that extend across the layer stack and that are separated by a first gap. First and second sidewall spacers are formed over the layer stack and within the first gap respectively adjacent to the first and second gate structures, and the layer stack is subsequently etched to form first and second body features that are separated by a second gap. The sacrificial layers are recessed relative to the nanosheet channel layers to define indents in the first and second body features, and the first and second sidewall spacers are subsequently removed. After removing the first and second sidewall spacers, a conformal layer is deposited in the second gap that fills the indents to define inner spacers.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: October 27, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Julien Frougier, Ruilong Xie, Daniel Chanemougame
  • Patent number: 10797138
    Abstract: Methods of forming contacts for vertical-transport field-effect transistors and structures for a vertical-transport field-effect transistor and contact. An interlayer dielectric layer is deposited over a gate stack, and a first opening is formed in the interlayer dielectric layer and penetrates through the gate stack to cut the gate stack into a first section and a second section. A dielectric pillar is formed in the first opening and is arranged between the first section of the gate stack and the second section of the gate stack. Second and third openings are formed in the interlayer dielectric layer that penetrate to the gate stack and that are divided by the dielectric pillar. A first contact in the second opening is coupled with the first section of the gate stack, and a second contact in the third opening is coupled with the second section of the gate stack.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: October 6, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Emilie Bourjot, Daniel Chanemougame, Steven Bentley
  • Patent number: 10770585
    Abstract: A device including a self-aligned buried contact between spacer liners and isolated from a pull down (PD)/pull-up (PU) shared gate and an n-channel field-effect transistor (NFET) pass gate (PG) gate and method of production thereof. Embodiments include first and second high-k/metal gate (HKMG) structures over a first portion of a substrate, and a third HKMG structure over a second portion of the substrate; an inter-layer dielectric (ILD) over a portion of the substrate and on sidewalls of the first, second and third HKMG structures; a spacer liner on sidewalls of the ILD between the second and third HKMG structures; and a buried contact layer between the spacer liner and in a portion of the substrate.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: September 8, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Chanro Park, Andre Labonte, Daniel Chanemougame
  • Publication number: 20200266169
    Abstract: Aspects of the disclosure provide a method for fabricating a semiconductor device. The method includes forming dummy power rails on a substrate by accessing from a first side of the substrate that is opposite to a second side of the substrate. Further, the method includes forming transistor devices and first wiring layers on the substrate by accessing the first side of the substrate. The dummy power rails are positioned below a level of the transistor devices on the first side of the substrate. Then, the method includes replacing the dummy power rails with conductive power rails by accessing from the second side of the substrate that is opposite to the first side of the substrate.
    Type: Application
    Filed: February 5, 2020
    Publication date: August 20, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Hoyoung KANG, Lars LIEBMANN, Jeffrey SMITH, Anton DEVILLIERS, Daniel CHANEMOUGAME
  • Patent number: 10727308
    Abstract: One device disclosed herein includes a gate above a semiconductor substrate, the gate comprising a gate structure and a gate cap, and conductive source/drain metallization structures adjacent the gate, each of the conductive source/drain metallization structures having a front face and a recess defined in each of the conductive source/drain metallization structures. In this example, the device further includes a spacer structure comprising recess filling portions that substantially fill the recesses and a portion that extends across a portion of the upper surface of the gate cap, wherein a portion of the gate cap is exposed within the spacer structure, an insulating material within the spacer structure and on the exposed portion of the gate cap, a gate contact opening that exposes a portion of an upper surface of the gate structure, and a conductive gate contact structure in the conductive gate contact opening.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: July 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Hao Tang, Cheng Chi, Daniel Chanemougame, Lars W. Liebmann, Mark V. Raymond
  • Patent number: 10699942
    Abstract: Methods and structures that include a vertical-transport field-effect transistor. First and second semiconductor fins are formed that project vertically from a bottom source/drain region. A first gate stack section is arranged to wrap around a portion of the first semiconductor fin, and a second gate stack section is arranged to wrap around a portion of the second semiconductor fin. The first gate stack section is covered with a placeholder structure. After covering the first gate stack section with the placeholder structure, a metal gate capping layer is deposited on the second gate stack section. After depositing the metal gate capping layer on the second gate stack section, the placeholder structure is replaced with a contact that is connected with the first gate stack section.
    Type: Grant
    Filed: April 24, 2018
    Date of Patent: June 30, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Chanro Park, Daniel Chanemougame, Steven Soss, Lars Liebmann, Hui Zang, Shesh Mani Pandey
  • Publication number: 20200203497
    Abstract: One illustrative integrated circuit (IC) product disclosed herein includes a first conductive source/drain contact structure of a first transistor with an insulating source/drain cap positioned above at least a portion of an upper surface of the first conductive source/drain contact structure and a gate-to-source/drain (GSD) contact structure that is conductively coupled to the first conductive source/drain contact structure and a first gate structure of a second transistor. In this example, the product also includes a gate contact structure that is conductively coupled to a second gate structure of a third transistor, wherein an upper surface of each of the GSD contact structure and the gate contact structure is positioned at a first level that is at a level that is above a level of an upper surface of the insulating source/drain cap.
    Type: Application
    Filed: February 28, 2020
    Publication date: June 25, 2020
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Patent number: 10692991
    Abstract: Disclosed are structures including a gate-all-around field effect transistor (GAAFET) with air-gap inner spacers. The GAAFET includes a stack of nanoshapes that extend laterally between source/drain regions, a gate that wraps around a center portion of each nanoshape, and a gate sidewall spacer on external sidewalls of the gate. The GAAFET also includes air-gap inner spacers between the gate and the source/drain regions. Each air-gap inner spacer includes: two vertical sections within the gate sidewall spacer on opposing sides of the stack and adjacent to a source/drain region; and horizontal sections below the nanoshapes and extending laterally between the vertical sections. Also discloses are methods of forming the structures and the method include forming preliminary inner spacers in inner spacer cavities prior to source/drain region formation. After source/drain regions are formed, the preliminary inner spacers are removed and the cavities are sealed off, thereby forming the air-gap inner spacers.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: June 23, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Daniel Chanemougame, Julien Frougier, Ruilong Xie
  • Publication number: 20200194306
    Abstract: Methods for forming a cut between interconnects and structures with cuts between interconnects. A layer is patterned to form first, second, and third features having a substantially parallel alignment with the second feature between the first feature and the third feature. A sacrificial layer is formed that is arranged between the first and second features and between the second and third features. The sacrificial layer is patterned to form a cut between the first and second features from which a portion of the sacrificial layer is fully removed and to form a cavity in a portion of the sacrificial layer between the second and third features. A dielectric layer is formed inside the cut between the first and second features. After depositing the section of the dielectric material and forming the dielectric layer, the sacrificial layer is removed.
    Type: Application
    Filed: December 14, 2018
    Publication date: June 18, 2020
    Inventors: Ruilong Xie, Hui Zang, Lei Sun, Lars Liebmann, Daniel Chanemougame, Guillaume Bouche
  • Patent number: 10685874
    Abstract: Methods for forming a cut between interconnects and structures with cuts between interconnects. A layer is patterned to form first, second, and third features having a substantially parallel alignment with the second feature between the first feature and the third feature. A sacrificial layer is formed that is arranged between the first and second features and between the second and third features. The sacrificial layer is patterned to form a cut between the first and second features from which a portion of the sacrificial layer is fully removed and to form a cavity in a portion of the sacrificial layer between the second and third features. A dielectric layer is formed inside the cut between the first and second features. After depositing the section of the dielectric material and forming the dielectric layer, the sacrificial layer is removed.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: June 16, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Hui Zang, Lei Sun, Lars Liebmann, Daniel Chanemougame, Guillaume Bouche
  • Patent number: 10658243
    Abstract: The present disclosure relates to methods for forming replacement metal gate (RMG) structures and related structures. A method may include: forming a portion of sacrificial material around each fin of a set of adjacent fins; forming a first dielectric region between the portions of sacrificial material; forming a second dielectric region on the first dielectric region; forming an upper source/drain region from an upper portion of each fin; removing only the second dielectric region and the sacrificial material; and forming a work function metal (WFM) in place of the second dielectric region and the sacrificial material. The semiconductor structure may include gate structures surrounding adjacent fins; a first dielectric region between the gate structures; a second dielectric region above the first dielectric region and between the gate structures; and a liner between the first dielectric region and the gate structures such that the second dielectric region directly contacts the gate structures.
    Type: Grant
    Filed: June 7, 2018
    Date of Patent: May 19, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Daniel Chanemougame, Steven R. Soss, Steven J. Bentley, Chanro Park
  • Patent number: 10651284
    Abstract: One illustrative method disclosed includes, among other things, selectively forming a gate-to-source/drain (GSD) contact opening and a CB gate contact opening in at least one layer of insulating material and forming an initial gate-to-source/drain (GSD) contact structure and an initial CB gate contact structure in their respective openings, wherein an upper surface of each of the GSD contact structure and the CB gate contact structure is positioned at a first level, and performing a recess etching process on the initial GSD contact structure and the initial CB gate contact structure to form a recessed GSD contact structure and a recessed CB gate contact structure, wherein a recessed upper surface of each of these recessed contact structures is positioned at a second level that is below the first level.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: May 12, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Publication number: 20200144385
    Abstract: Fabricating a steep-switch transistor includes receiving a semiconductor structure including a substrate, a fin disposed on the substrate, a source/drain disposed on the substrate adjacent to the fin, a gate disposed upon the fin, a cap disposed on the gate, a trench contact formed on and in contact with the source/drain, and a source/drain contact formed on an in contact with the trench contact. A recess is formed in a portion of the source/drain contact using a recess patterning process. A bi-stable resistive system (BRS) material is deposited in the recess in contact with the portion of the source/drain contact. A metallization layer is formed in contact upon the BRS material, a portion of the source/drain contact, the BRS material, and a portion of the metallization layer contact forming a reversible switch.
    Type: Application
    Filed: January 3, 2020
    Publication date: May 7, 2020
    Applicant: International Business Machines Corporation
    Inventors: Julien Frougier, Nicolas Loubet, Ruilong Xie, Daniel Chanemougame, Ali Razavieh, Kangguo Cheng
  • Patent number: 10629516
    Abstract: Structures for field-effect transistors and methods for fabricating a structure for field-effect transistors. A contact structure is formed that includes a first contact arranged over a source/drain region and a second contact arranged over the first contact. A dielectric cap is formed over the second contact. A via is formed that extends in a vertical direction through the dielectric cap to the second contact. An interconnect is formed over the dielectric cap, and is connected by the via with the second contact.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: April 21, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Daniel Chanemougame, Julien Frougier, Ruilong Xie
  • Publication number: 20200098913
    Abstract: A device including a self-aligned buried contact between spacer liners and isolated from a pull down (PD)/pull-up (PU) shared gate and an n-channel field-effect transistor (NFET) pass gate (PG) gate and method of production thereof. Embodiments include first and second high-k/metal gate (HKMG) structures over a first portion of a substrate, and a third HKMG structure over a second portion of the substrate; an inter-layer dielectric (ILD) over a portion of the substrate and on sidewalls of the first, second and third HKMG structures; a spacer liner on sidewalls of the ILD between the second and third HKMG structures; and a buried contact layer between the spacer liner and in a portion of the substrate.
    Type: Application
    Filed: September 24, 2018
    Publication date: March 26, 2020
    Inventors: Ruilong XIE, Chanro PARK, Andre LABONTE, Daniel CHANEMOUGAME
  • Publication number: 20200091237
    Abstract: Embodiments of the invention are directed to a method and resulting structures for a steep-switch vertical field effect transistor (SS-VFET). In a non-limiting embodiment of the invention, a semiconductor fin is formed vertically extending from a bottom source or drain region of a substrate. A top source or drain region is formed on a surface of the semiconductor fin and a top metallization layer is formed on the top source or drain region. A bi-stable resistive system is formed on the top metallization layer. The bi-stable resistive system includes an insulator-to-metal transition material or a threshold-switching selector. The SS-VFET provides a subthreshold switching slope of less than 60 millivolts per decade.
    Type: Application
    Filed: October 30, 2019
    Publication date: March 19, 2020
    Inventors: Daniel Chanemougame, Julien Frougier, Nicolas J. Loubet, Ruilong Xie