Patents by Inventor Daniel D. Burkey

Daniel D. Burkey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical vapor deposition of organosilicate thin films
    Publication number: 20040137243
    Abstract: Methods are disclosed for fabricating organosilicate glass (OSG) films that have both a low dielectric constant and superior mechanical strength are disclosed. Cyclic siloxane OSG precursors, such as 1,3,5-trivinyl-1,3,5-trimethylcyclotrisiloxane (V3D3), are used in conjunction with a mild oxidant to partially oxidize the cyclic structures leading to the formation of silanol groups. The silanol groups can be subsequently condensed to form a porous OSG film.
    Type: Application
    Filed: October 21, 2003
    Publication date: July 15, 2004
    Applicant: Massachusetts Institute of Technology
    Inventors: Karen K. Gleason, Daniel D. Burkey