Abstract: In a first mode, a monitoring system inputs humidified gas through at least a portion of a conduit. At least a portion of the water in the humidified gas adheres to the inner surface of the conduit, inhibiting contaminants in the gas sample from adhering to the inner surface. The water in the humidified gas may also push any contaminants adhered to the surface of the sample line back out the sample line. In a second mode, after previously passing the humidified gas through the conduit, the monitoring system controls a flow of a gas sample including the contaminants through the conduit to a gas analyzer. The one or more layer of water on the inner surface of the conduit prevents or reduces a buildup of undesirable contaminants on an inner surface of a conduit that conveys gas samples.

Abstract: In a first mode, a monitoring system inputs humidified gas through at least a portion of a conduit. At least a portion of the water in the humidified gas adheres to the inner surface of the conduit, inhibiting contaminants in the gas sample from adhering to the inner surface. The water in the humidified gas may also push any contaminants adhered to the surface of the sample line back out the sample line. In a second mode, after previously passing the humidified gas through the conduit, the monitoring system controls a flow of a gas sample including the contaminants through the conduit to a gas analyzer. The one or more layer of water on the inner surface of the conduit prevents or reduces a buildup of undesirable contaminants on an inner surface of a conduit that conveys gas samples.

Abstract: A method for the extraction and purification of molybdenum, the method comprising the steps of: transferring an irradiated fuel solution to an extraction system, the irradiated fuel solution comprising iodine and molybdenum and other fission products, the extraction system comprising at least one sorbent column; passing the irradiated fuel solution upwards through the at least one sorbent-containing extraction column; directing the irradiated fuel solution towards a fuel management system by means of at least one discharge alignment valve; directing the extraction column eluate towards an iodine removal system; removing the iodine from the extraction column eluate; purifying the extraction column eluate; and collecting the purified eluate. Also disclosed is an apparatus for accomplishing the aforementioned method.

Abstract: A method for the extraction and purification of molybdenum, the method comprising the steps of: transferring an irradiated fuel solution to an extraction system, the irradiated fuel solution comprising iodine and molybdenum and other fission products, the extraction system comprising at least one sorbent column; passing the irradiated fuel solution upwards through the at least one sorbent-containing extraction column; directing the irradiated fuel solution towards a fuel management system by means of at least one discharge alignment valve; directing the extraction column eluate towards an iodine removal system; removing the iodine from the extraction column eluate; purifying the extraction column eluate; and collecting the purified eluate. Also disclosed is an apparatus for accomplishing the aforementioned method.

Abstract: In an apparatus for removing material from an article, such as an exposed surface of an intermediate integrated circuit structure, by planarizing, polishing, etching or the like, a sensor is mechanically coupled to a moving carrier of the article for directing through the article to its first side an electromagnetic radiation beam having a wavelength band to which the structure is substantially transparent. The beam is detected after interacting with the article, such as being reflected from its exposed surface, and resulting information of the state of the processing of the exposed surface is transmitted from the moving carrier to a stationary receiver by radiation without the use of any physical transmission media such as wires or optical fibers. Multiple sensors mounted on the moving article carrier provide information of the uniformity of the processing across the exposed article surface.

Abstract: A detector structure and technique for non-contact monitoring of a process being performed on a surface, such as in semiconductor wafer integrated circuit processing and flat panel display substrate processing, in order to determine when the process has reached endpoint. In one embodiment, multiple small area radiation sources, such as light emitting diodes, are symmetrically arranged around a large area photodetector, and each have similar radiation distribution patterns. In an alternative embodiment, multiple photodetectors are symmetrically arranged around a single light emitting diode with a symmetrical radiation distribution pattern. In either case, the amount of source radiation reflected onto the detector from the surface being processed is not significantly affected by any wobble or tilting of the surface that may occur during processing.