Abstract: A reversible bonded microfluidic structure comprises an overhanging cap or gasket structure atop a continuous microfluidic channel wall. An overhanging gasket structure may reduce stress concentrations at the edge of the channel wall and can permit improved reversible adhesion of the channel wall and adjacent dry adhesive fibers. In one example, reversible adhesion of the overhanging channel wall gasket and adjacent dry adhesive fibers may approach 1 MPa in axial loading. An overhanging gasket structure of the microfluidic channel wall may comprise a single “fiber” that is continuous around the perimeter of the desired microfluidic channel shape, and may define a self-sealing gasket which will contain fluid. The overhanging gasket structure may be surrounded by further overhanging or undercut dry adhesive fibers to enhance the adhesion and help make the rest of the surface more tolerant to defects and surface roughness.

Abstract: A dry adhesive structure and a method for manufacturing thereof is disclosed. In an embodiment, the dry adhesive structure comprises a base structure and a plurality of fiber structures is disclosed, wherein each of the plurality of fiber structures comprises a cap structure that substantially overhangs its corresponding fiber structure on at least one side. The method for manufacturing the dry adhesive structure comprises applying a photosensitive material to substrate comprising polymethyl acrylate, patterning and developing the photoresistive material to form a mask comprising the overhanging cap structure, exposing the mask to UV light, developing the substrate to form undercut fiber structures, molding an elastomer rubber materials to form an elastomer rubber negative mold, and molding a flexible polymer material in the elastomer rubber negative mold to form the dry adhesive structure.

Abstract: A reversible bonded microfluidic structure comprises an overhanging cap or gasket structure atop a continuous microfluidic channel wall. An overhanging gasket structure may reduce stress concentrations at the edge of the channel wall and can permit improved reversible adhesion of the channel wall and adjacent dry adhesive fibers. In one example, reversible adhesion of the overhanging channel wall gasket and adjacent dry adhesive fibers may approach 1 MPa in axial loading. An overhanging gasket structure of the microfluidic channel wall may comprise a single “fiber” that is continuous around the perimeter of the desired microfluidic channel shape, and may define a self-sealing gasket which will contain fluid. The overhanging gasket structure may be surrounded by further overhanging or undercut dry adhesive fibers to enhance the adhesion and help make the rest of the surface more tolerant to defects and surface roughness.

Abstract: Geometric configurations for interlocking cap and fiber structures of interlocking dry adhesive materials are disclosed. Various methods for manufacturing interlocking dry adhesive materials including using a flexible negative mold and thermoplastic polymer dry adhesive material are disclosed. Various methods of manufacturing directly molded anisotropic interlocking dry adhesive structures using thermoplastic polymer dry adhesive materials are also provided.

Abstract: The effectiveness of biomimetic dry adhesives at different ambient pressures is investigated. Biomimetic dry adhesives have great potential for space applications but there have been few studies on how these adhesives perform in low-pressure environments. Various geometrical configurations for cap and fiber structures of dry adhesive materials are disclosed. Various methods for manufacturing dry adhesive materials including a silicone rubber negative mold are disclosed. Various methods of manufacturing directly molded anisotropic dry adhesive structures with anisotropic peel strengths are also provided.

Abstract: The effectiveness of biomimetic dry adhesives at different ambient pressures is investigated. Biomimetic dry adhesives have great potential for space applications but there have been few studies on how these adhesives perform in low-pressure environments. Various geometrical configurations for cap and fiber structures of dry adhesive materials are disclosed. Various methods for manufacturing dry adhesive materials including a silicone rubber negative mold are disclosed. Various methods of manufacturing directly molded anisotropic dry adhesive structures with anisotropic peel strengths are also provided.

Abstract: There is disclosed a method of heating a wafer for bonding, the method comprising adding a patterned susceptor close to a wafer interface, and applying microwave energy to the patterned susceptor. There is also disclosed an electrically conductive film, in direct contact with a relatively non-conductive substrate (preferably a thermoplastic) and made of individual electrically isolated elements (features) with a maximum dimension less than ¼ the wavelength used in the microwave, and minimum dimension greater than 100 um in the plane of the film. The film and substrate is selectively heated by resistive loss caused by dissipated energy from microwave radiation.

Abstract: Lithographically fabricated apparatus are provided. The apparatus are capable of self-assembly to extend at least in part in an out-of-plane direction. A cantilever arm is anchored to a substrate at one of its ends and fabricated to provide a cantilever portion that extends from the anchor in a longitudinal direction generally parallel to the substrate, One or more posts are fabricated atop the cantilever portion. The posts shrink from a first volume to a second volume, less than the first volume, during fabrication thereof. The change in volume of the post from the first volume to the second volume causes stress between the post and the cantilever arm resulting in the cantilever portion bending from an in-plane orientation extending in the longitudinal direction to a self-assembled orientation extending at least in part in an out-of-plane direction away from the substrate.

Abstract: Lithographically fabricated apparatus are provided. The apparatus are capable of self-assembly to extend at least in part in an out-of-plane direction. A cantilever arm is anchored to a substrate at one of its ends and fabricated to provide a cantilever portion that extends from the anchor in a longitudinal direction generally parallel to the substrate, One or more posts are fabricated atop the cantilever portion. The posts shrink from a first volume to a second volume, less than the first volume, during fabrication thereof. The change in volume of the post from the first volume to the second volume causes stress between the post and the cantilever arm resulting in the cantilever portion bending from an in-plane orientation extending in the longitudinal direction to a self-assembled orientation extending at least in part in an out-of-plane direction away from the substrate.