Abstract: An apparatus for laser processing of a workpiece is provided. The workpiece includes a transparent material. The apparatus includes a beam shaping device for forming a focus zone from an input laser beam. The focus zone is formed in elongate fashion in relation to a longitudinal axis. The focus zone has, in a plain perpendicular to the longitudinal axis, an asymmetric cross-section with a preferred direction. The apparatus further includes an actuating device for altering the preferred direction during the laser processing of the workpiece, and a control device for controlling the actuating device based on a predefined assignment specification in order to control the preferred direction by open-loop control or closed-loop control during the laser processing of the workpiece.

Abstract: A system includes an ultrashort pulse laser for providing a laser beam, a hollow core fiber, an input coupling optical unit configured to input couple the laser beam into the hollow core fiber, a lens device on which an output coupled laser beam from the hollow core fiber is incident, a beam shaping element on which the laser beam emerging from the lens device is incident, and a focusing optical unit. The lens device is configured to adjust a divergence angle of the output coupled laser beam for adjusting a beam diameter of the laser beam on the beam shaping element. The beam shaping element is configured to impose upon the laser beam a quasi-non-diffractive beam shape with a focal zone that is elongated in the beam propagation direction. The focusing optical unit is configured to set a penetration depth of the focal zone in or on the material.

Abstract: An apparatus for laser machining a workpiece in a machining plane includes a first laser machining unit for forming a first focal zone which extends in a first main direction of extent, and at least one further laser machining unit for forming at least one further focal zone which extends in a further main direction of extent oriented transversely to the first main direction of extent. The first focal zone and the at least one further focal zone are spaced apart from one another parallel to the machining plane at a work distance. The first laser machining unit and the at least one further laser machining unit are movable in an advancement direction that is oriented parallel to the machining plane. The workpiece comprises a material that is transparent to a laser beam which respectively forms the first focal zone and the at least one further focal zone.

Abstract: An apparatus for laser machining a workpiece with a material transparent to the laser machining includes a first beam shaping device with a beam splitting element for splitting a first input beam into a plurality of component beams, and a focusing optical unit configured to image the plurality of component beams into at least one focal zone. The first input beam is split by the beam splitting element by phase imposition on the first input beam. The component beams are focused into different partial regions of the at least one focal zone for forming the at least one focal zone. The at least one focal zone is introduced by the focusing optical unit into the material for laser machining the workpiece. Material modifications associated with a crack formation in the material are produced in the material by exposing the material to the at least one focal zone.

Abstract: An apparatus for laser machining a workpiece includes a first beam shaping device comprising a beam splitting element for splitting a first input beam into a plurality of component beams, and a focusing optical unit configured to image the component beams into at least one focal zone. The first input beam is split by the beam splitting element by phase imposition on the first input beam. The component beams are focused into different partial regions of the at least one focal zone for forming the at least one focal zone. The at least one focal zone is introduced into the material at a work angle with respect to an outer side of the workpiece for the laser machining of the workpiece. Material modifications associated with a change of a refractive index of the material are produced in the material by exposing the material to the at least one focal zone.

Abstract: A method for separating a workpiece includes removing material of the workpiece along a separation line by using a laser beam comprising ultrashort laser pulses of an ultrashort pulse laser. The material of the workpiece is transparent to a wavelength of the laser beam, and has a refractive index between 2.0 and 3.5. The method further includes separating the workpiece along a notch formed by the removal of the material.

Abstract: An apparatus for laser machining a workpiece includes a beam shaping device for forming a focal zone from an input laser beam incident on the beam shaping device, and a telescope device for imaging the focal zone into a material of the workpiece. The beam shaping device is configured to impose a phase on a beam cross section of the input laser beam in such a way that the focal zone extends along a longitudinal centre axis which is curved at least in certain portions. The telescope device is assigned a beam splitting device for splitting an output laser beam output coupled from the beam shaping device into a plurality of polarized partial beams, each of which has one of at least two different polarization states. The focal zone has an asymmetrical cross section in a plane oriented perpendicular to the longitudinal centre axis.

Abstract: A method for separating a workpiece includes providing ultrashort laser pulses using an ultrashort pulse laser, and introducing material modifications into the workpiece along a separation line using the ultrashort laser pulses. The workpiece includes a transparent material. The method further includes separating the material of the workpiece along the separation line. The laser pulses form a laser beam that is incident onto the workpiece at a work angle. An optical aberration of the laser pulses during a transition into the material of the workpiece is reduced by an aberration correction device. The laser beam has a non-radially symmetric transverse intensity distribution, with the transverse intensity distribution appearing elongate in a direction of a first axis in comparison with a second axis perpendicular to the first axis.

Abstract: A method for separating a workpiece having a transparent material includes providing ultrashort laser pulses using an ultrashort pulse laser, introducing material modifications into the transparent material of the workpiece along a separation line, and separating the material of the workpiece along the separation line. The laser pulses form a laser beam that is incident onto the workpiece at a work angle. The material modifications are Type III modifications associated with a formation of cracks in the material of the workpiece. The material modifications penetrate two sides of the workpiece that are located in intersecting planes. Separating the material of the workpiece produces a chamfer and/or a bevel. A length of a hypotenuse of the chamfer and/or bevel is between 50 ?m and 5000 ?m.

Abstract: A method for separating a workpiece having a transparent material includes providing ultrashort laser pulses using an ultrashort pulse laser, introducing material modifications into the transparent material of the workpiece along a separation line using the laser pulses, and separating the material of the workpiece along the separation line. The laser pulses form a laser beam that is incident onto the workpiece at a work angle. The material modifications are Type I and/or Type II modifications associated with a change in a refractive index of the material of the workpiece. The material modifications penetrate two sides of the workpiece that are located in intersecting planes. Separating the material of the workpiece produces a chamfer and/or a bevel. A length of a hypotenuse of the chamfer and/or bevel is between 50 ?m and 500 ?m.

Abstract: An apparatus for combining a plurality of coherent laser beams includes at least N?1 phase setting devices configured to set a respective phase (??n) of a respective one of the plurality of coherent laser beams, and a beam combination device configured to combine the plurality of coherent laser beams to form at least one combined laser beam. The beam combination device includes a microlens arrangement having at least two microlens arrays configured to form the at least one combined laser beam.

Abstract: A method for separating a workpiece along a separation line by using ultrashort laser pulses of a laser beam includes splitting the laser beam, using a beam splitter optical unit, into a plurality of partial laser beams. Each partial laser beam is focused by a focusing optical unit onto a surface and/or into a volume of the workpiece so that the partial laser beams are arranged next to one another and spaced apart from one another along the separation line. The method further includes implementing material ablation in the workpiece along the separation line by introducing the ultrashort laser pulses into the workpiece. The partial laser beams are repeatedly moved away from an initial position along the separation line by a deflection value and are subsequently moved back into the initial position. The deflection value is less than or equal to a distance between two adjacent partial laser beams.

Abstract: For material processing of a material, which is in particular for a laser beam to a large extent transparent, asymmetric shaped modifications are created transverse to the propagation direction of the laser beam. Thereby, the laser beam is shaped for forming an elongated focus zone in the material, wherein the focus zone is such that it includes at least one intensity maximum, which is transverse flattened in a flattening direction, or a transverse and/or axial sequence of asymmetric intensity maxima, which are flattened in a sequence direction. After positioning the focus zone in the material, a modification is created and the material and the focus zone are moved relative to each other in the or across to the flattening direction or in the or across to the sequence direction for forming a crack along an induced preferred direction.

Abstract: A method for material processing of a workpiece includes radiating a pulsed raw laser beam into an optical beam shaping system in order to form a quasi-non-diffractive laser beam with a focal zone extending in a longitudinal direction for the material processing of the workpiece. The optical beam shaping system is configured to impose a phase onto a beam cross section of the raw laser beam for forming phase-imposed laser radiation. The method further includes focusing the phase-imposed laser radiation into the workpiece so that the quasi-non-diffractive laser beam is formed and the focal zone has an intensity distribution that is adjustable along the longitudinal direction. The phase imposed on the beam cross section of the raw laser beam is set so that the intensity distribution of the quasi-non-diffractive laser beam in the focal zone is at least approximately constant in the longitudinal direction.

Abstract: A method for severing an at least partially transparent material includes focusing ultrashort laser pulses, as individual laser pulses and/or as pulse trains, in the material so that a resulting modification zone elongated in a beam propagation direction enters the material and penetrates at least one surface of the material. Each pulse train comprises multiple sub-laser pulses, The method further includes introducing a plurality of material modifications along a severing line into the material via the laser pulses, and severing the material along the severing line, A pulse energy of the individual laser pulses or a sum of pulse energies of the sub-laser pulses is in a range from 500 ?J to 50 mJ. A length of the modification zone in the beam propagation direction is greater than a thickness of the material.

Abstract: A method for separating an ultrathin glass using ultrashort laser pulses of an ultrashort pulse laser includes focusing the ultrashort laser pulses into the ultrathin glass such that a resulting focal zone is elongated in a beam direction and extends over an entire thickness of the ultrathin glass. The ultrashort laser pulses have a non-radially symmetric beam cross section perpendicular to a beam propagation direction. The method further includes introducing material modifications into the ultrathin glass along a separating line using the ultrashort laser pulses focused into the ultrathin glass, and separating the ultrathin glass along the separating line.

Abstract: A method for separating a workpiece along a separation line by using ultrashort laser pulses of a laser beam includes splitting the laser beam, using a beam splitter optical unit, into a plurality of partial laser beams. Each partial laser beam is focused by a focusing optical unit onto a surface and/or into a volume of the workpiece so that the partial laser beams are arranged next to one another and spaced apart from one another along the separation line. The method further includes implementing material ablation in the workpiece along the separation line by introducing the ultrashort laser pulses into the workpiece. The partial laser beams are repeatedly moved away from an initial position along the separation line by a deflection value and are subsequently moved back into the initial position. The deflection value is less than or equal to a distance between two adjacent partial laser beams.

Abstract: A method for separating a workpiece along a separation line by using laser pulses of a laser beam includes splitting the laser beam into a plurality of partial laser beams using a beam splitter optical unit, focusing the plurality of partial laser beams onto a surface of the workpiece and/or into a volume of the workpiece using a focusing optical unit, so that the plurality of partial laser beams are arranged next to one another and spaced apart from one another along the separation line, and ablating material of the workpiece along the separation line by introducing the laser pulses of the plurality of partial laser beams into the workpiece. The laser power per partial laser beam is adjusted depending on an ablation depth obtained in the workpiece.

Abstract: A processing optical unit for workpiece processing includes a polarizer arrangement comprising a birefringent polarizer element for splitting at least one input laser beam into at least two partial beams each partial beam having one of two different polarization states, and a focusing optical unit arranged downstream of the polarizer arrangement in the beam path and configured to focus the partial beams onto at least two focus zones. The polarizer arrangement has a further optical element arranged downstream of the birefringent polarizer element in the beam path and configured to change an angle and/or a distance of at least one of the partial beams relative to an optical axis of the processing optical unit.

Abstract: A method for processing a workpiece using a pulsed laser beam includes beam shaping of the laser beam to form an elongated focus zone in the material of the workpiece. The beam shaping is carried out by using an arrangement of diffractive, reflective and/or refractive optical assemblies. The beam shaping includes focus-forming beam shaping to cause beam portions to enter at an entry angle to a beam axis of the laser beam for forming the elongated focus zone along the beam axis in the workpiece by way of interference, and phase-correcting beam shaping to counteract any influence of the interference by entrance of the laser beam into the workpiece. The method further includes setting beam parameters of the laser beam so that the material of the workpiece is modified in the elongated focus zone.