Patents by Inventor Daniel Gäbler

Daniel Gäbler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11646389
    Abstract: A light sensitive semiconductor structure including a pn-junction in a silicon substrate. The pn-junction includes a central part and an edge part around surrounding the central part, the edge part being in contact with a surface of the silicon substrate. The structure further includes a plasma shielding structure covering at least a depletion width of the pn-junction over at least a part of the edge part where the edge part contacts the surface of the silicon substrate.
    Type: Grant
    Filed: November 10, 2021
    Date of Patent: May 9, 2023
    Assignee: X-FAB Global Services GmbH
    Inventor: Daniel Gäbler
  • Patent number: 11605742
    Abstract: A dark reference device comprises: a photodiode comprising an optical active area; a light shield configured to prevent light from entering said optical active area, wherein said light shield comprises first and second overlapping metal covers, and wherein each of said metal covers comprises a plurality of openings overlapping said optical active area.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: March 14, 2023
    Assignee: X-FAB Global Services GmbH
    Inventors: Daniel Gäbler, Pablo Siles
  • Patent number: 11575061
    Abstract: A single photon avalanche diode (SPAD) device comprises: a silicon layer; an active region in said silicon layer for detecting incident light; and a blocking structure overlapping said active region for blocking incident light having a wavelength at least in the range of 200 nm to 400 nm, so that light having said wavelength can only be detected by said SPAD device when incident upon a region of said silicon layer outside of said active region.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: February 7, 2023
    Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
    Inventors: Daniel Gäbler, Hannes Schmidt, Pablo Siles, Matthias Krojer, Alexander Zimmer
  • Publication number: 20220359780
    Abstract: A light sensitive semiconductor structure comprises: a substrate; a doped upper region of said substrate having a first type of doping; a first implant region located below and being in direct contact with said doped upper region, said first implant region having a second type of doping so that a pn-junction is located between said doped upper region and said first implant region; and a second implant region located below said first implant region and having said second type of doping, and wherein a peak in a doping profile of said second type of doping is located in said second implant region.
    Type: Application
    Filed: May 10, 2022
    Publication date: November 10, 2022
    Inventors: Daniel Gäbler, Alexander Zimmer, Robin Weirauch
  • Patent number: 11404461
    Abstract: A Complementary Metal Oxide Semiconductor, CMOS, device for radiation detection. The CMOS device includes a semiconductor diffusion layer having a photodetector region for receiving incident light, and a polysilicon layer having a patterned structure in a region at least partially overlapping the photodetector region. The structure includes a plurality of features being perforations extending through the polysilicon layer or columns of polysilicon, wherein the perforations are filled with, or the columns are surrounded by, a dielectric material.
    Type: Grant
    Filed: June 25, 2019
    Date of Patent: August 2, 2022
    Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
    Inventor: Daniel Gäbler
  • Publication number: 20220149222
    Abstract: A light sensitive semiconductor structure including a pn-junction in a silicon substrate. The pn-junction includes a central part and an edge part around surrounding the central part, the edge part being in contact with a surface of the silicon substrate. The structure further includes a plasma shielding structure covering at least a depletion width of the pn-junction over at least a part of the edge part where the edge part contacts the surface of the silicon substrate.
    Type: Application
    Filed: November 10, 2021
    Publication date: May 12, 2022
    Applicant: X-FAB Global Services GmbH
    Inventor: Daniel GÄBLER
  • Publication number: 20220149105
    Abstract: A semiconductor imaging apparatus including a light detection device in a silicon substrate, an optical filter arranged to filter light incident on the light detection device and including a gap for allowing unfiltered light to reach the silicon substrate, an isolation structure for stopping light generated charge carriers in the silicon substrate from reaching the light detection device, and a photodiode for detecting the charge carriers.
    Type: Application
    Filed: October 21, 2021
    Publication date: May 12, 2022
    Applicant: X-FAB Global Services GmbH
    Inventors: Daniel Gäbler, Alexander Zimmer
  • Patent number: 11276787
    Abstract: A semiconductor device for light detection comprises: a photodiode comprising an optical active region; and a resistor connected to said photodiode and overlapping at least a part of said optical active region, wherein the resistor comprising an anti-reflective coating for reducing reflection loss.
    Type: Grant
    Filed: April 21, 2020
    Date of Patent: March 15, 2022
    Assignee: X-FAB Semiconductor Foundries GmbH
    Inventor: Daniel Gäbler
  • Publication number: 20210399149
    Abstract: A dark reference device comprises: a photodiode comprising an optical active area; a light shield configured to prevent light from entering said optical active area, wherein said light shield comprises first and second overlapping metal covers, and wherein each of said metal covers comprises a plurality of openings overlapping said optical active area.
    Type: Application
    Filed: June 17, 2021
    Publication date: December 23, 2021
    Inventors: Daniel Gäbler, Pablo Siles
  • Publication number: 20210375968
    Abstract: An optical sensor including an array of photodiodes having a first and a second photodiode, each having an optical active region and a peripheral region. The sensor further includes a metal layer having a plurality of metal wires located in the peripheral regions of the first and second photodiodes, wherein the first photodiode is connected to a first subset of metal wires of the plurality of metal wires and wherein the second photodiode is connected to a second, different subset of metal wires of the plurality of metal wires.
    Type: Application
    Filed: May 28, 2021
    Publication date: December 2, 2021
    Applicant: X-FAB Global Services GmbH
    Inventor: Daniel Gäbler
  • Patent number: 11177410
    Abstract: Electrically modulatable photodiode, comprising a substrate having a first and a second p-n junction, a common contact for jointly contacting the p or n dopings of the two p-n junctions, and two further contacts for separately contacting the other doping of the p and n dopings of the two p-n junctions, and a circuit, wherein the circuit is designed to measure a current flow caused by charge carriers which have been generated by impinging radiomagnetic waves in the substrate and which have reached the first further contact, and to switch the second further contact at different times to at least one first and one second switching state, wherein in the first switching state the second further contact is switched to the floating state and in the second switching state a potential is applied, and wherein a blocking voltage applied between the common contact and the first further contact is constant.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: November 16, 2021
    Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
    Inventors: Daniel Gäbler, Sebastian Wicht
  • Patent number: 11107851
    Abstract: A semiconductor device for light detection including a semiconductor layer having an optical active region for receiving incident light and a peripheral region around the optical active region. The device further includes a lens layer including a first lens for directing light into the optical active region, the first lens being located in a first region of the lens layer which overlaps a part but not the whole of the optical active region in the semiconductor layer.
    Type: Grant
    Filed: August 7, 2019
    Date of Patent: August 31, 2021
    Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
    Inventor: Daniel Gäbler
  • Publication number: 20210255231
    Abstract: A semiconductor structure for measuring a breakdown voltage of a pn-junction, said semiconductor structure comprises: a substrate; a sensor device comprising an optical active region comprising said pn-junction in said substrate, wherein said sensor device is configured to apply a reverse bias voltage to said pn-junction; and an emitter located adjacent to said optical active region in said substrate and configured to provide charge carriers to said optical active region in order to trigger breakdown of said pn-junction when said reverse bias voltage is equal to or greater than said breakdown voltage.
    Type: Application
    Filed: February 18, 2021
    Publication date: August 19, 2021
    Inventors: Alexander Zimmer, Daniel Gäbler
  • Publication number: 20200411710
    Abstract: A single photon avalanche diode (SPAD) device comprises: a silicon layer; an active region in said silicon layer for detecting incident light; and a blocking structure overlapping said active region for blocking incident light having a wavelength at least in the range of 200 nm to 400 nm, so that light having said wavelength can only be detected by said SPAD device when incident upon a region of said silicon layer outside of said active region.
    Type: Application
    Filed: June 24, 2020
    Publication date: December 31, 2020
    Inventors: Daniel Gäbler, Hannes Schmidt, Pablo Siles, Matthias Krojer, Alexander Zimmer
  • Publication number: 20200343389
    Abstract: A semiconductor device for light detection comprises: a photodiode comprising an optical active region; and a resistor connected to said photodiode and overlapping at least a part of said optical active region, wherein the resistor comprising an anti-reflective coating for reducing reflection loss.
    Type: Application
    Filed: April 21, 2020
    Publication date: October 29, 2020
    Inventor: Daniel Gäbler
  • Patent number: 10672808
    Abstract: An optical sensor in which photo currents generated by light in the visible and infrared wavelength ranges are to be tapped separately at pn junctions of active regions. The active regions include n- or p-doping and are formed in a p-substrate 52. The optical sensor comprises a surface-near first active region 12, and a second active region 14 subjacent to the first active region 12 and forming together with the first active region 12 a pn junction 22 that is short-circuited. A third active region 20 is subjacent to the second active region 14 and forming together with the second active region a further pn junction 23. Together with a fourth active region 24 subjacent to the second active region 20, a further pn junction 25, 29 is formed together with the third active region 20 and the substrate 52.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: June 2, 2020
    Assignee: X-FAB Semiconductor Foundries GmbH
    Inventor: Daniel Gaebler
  • Publication number: 20200052026
    Abstract: A semiconductor device for light detection including a semiconductor layer having an optical active region for receiving incident light and a peripheral region around the optical active region. The device further includes a lens layer including a first lens for directing light into the optical active region, the first lens being located in a first region of the lens layer which overlaps a part but not the whole of the optical active region in the semiconductor layer.
    Type: Application
    Filed: August 7, 2019
    Publication date: February 13, 2020
    Applicant: X-FAB Semiconductor Foundries GmbH
    Inventor: Daniel Gäbler
  • Publication number: 20190393251
    Abstract: A Complementary Metal Oxide Semiconductor, CMOS, device for radiation detection. The CMOS device includes a semiconductor diffusion layer having a photodetector region for receiving incident light, and a polysilicon layer having a patterned structure in a region at least partially overlapping the photodetector region. The structure includes a plurality of features being perforations extending through the polysilicon layer or columns of polysilicon, wherein the perforations are filled with, or the columns are surrounded by, a dielectric material.
    Type: Application
    Filed: June 25, 2019
    Publication date: December 26, 2019
    Applicant: X-FAB Semiconductor Foundries GmbH
    Inventor: Daniel Gäbler
  • Publication number: 20190363113
    Abstract: An optical sensor in which photo currents generated by light in the visible and infrared wavelength ranges are to be tapped separately at pn junctions of active regions. The active regions include n- or p-doping and are formed in a p-substrate 52. The optical sensor comprises a surface-near first active region 12, and a second active region 14 subjacent to the first active region 12 and forming together with the first active region 12 a pn junction 22 that is short-circuited. A third active region 20 is subjacent to the second active region 14 and forming together with the second active region a further pn junction 23. Together with a fourth active region 24 subjacent to the second active region 20, a further pn junction 25, 29 is formed together with the third active region 20 and the substrate 52.
    Type: Application
    Filed: August 6, 2019
    Publication date: November 28, 2019
    Inventor: Daniel Gaebler
  • Publication number: 20190288151
    Abstract: Electrically modulatable photodiode, comprising a substrate having a first and a second p-n junction, a common contact for jointly contacting the p or n dopings of the two p-n junctions, and two further contacts for separately contacting the other doping of the p and n dopings of the two p-n junctions, and a circuit, wherein the circuit is designed to measure a current flow caused by charge carriers which have been generated by impinging radiomagnetic waves in the substrate and which have reached the first further contact, and to switch the second further contact at different times to at least one first and one second switching state, wherein in the first switching state the second further contact is switched to the floating state and in the second switching state a potential is applied, and wherein a blocking voltage applied between the common contact and the first further contact is constant.
    Type: Application
    Filed: March 13, 2019
    Publication date: September 19, 2019
    Inventors: Daniel GÄBLER, Sebastian WICHT