Abstract: A combination device includes at least two inputs and one or more outputs. Each input is for entry of a respective input beam. Each output is for exit of a respective output beam. The combination device is configured to form the respective output beam through a coherent combination of two input beams. The combination device is configured to set a polarization direction of the respective output beam based on a relative phase position of individual phases of the two input beams from which the respective output beam is formed through the coherent combination.

Abstract: A processing optical unit for workpiece processing includes a birefringent polarizer configured to split at least one input laser beam into a pair of partial beams polarized perpendicularly to one another. The processing optical unit further includes a focusing optical unit arranged downstream of the birefringent polarizer in the beam path and configured to focus the pair of partial beams onto focus zones in a focal plane. The processing optical unit is configured to produce at least partly overlapping focus zones of the pair of partial beams.

Abstract: An apparatus for combining coherent laser beams to form at least one combined laser beam includes a phase setting device, and a gain device for amplifying the coherent laser beams to form amplified coherent laser beams. The amplified coherent laser beams are output coupled from the gain device. The apparatus further includes a control device for controlling the phase setting device based on a specified assignment rule in order to set a respective phase difference between the amplified coherent laser beams to specified target phase difference values, a measuring device for determining a respective actual phase difference value between the amplified coherent laser beams, and an optimization unit coupled to the control device and configured to optimize the assignment rule based on the actual phase difference values determined by the measuring device.

Abstract: An apparatus for combining a plurality of coherent laser beams to form at least one combined laser beam includes a phase setting device for setting a respective phase difference between the coherent laser beams, and a gain device for amplifying the coherent laser beams. The amplified coherent laser beams are output coupled from the gain device. The apparatus further includes a measuring device configured to measure a respective actual phase difference between one of the amplified coherent laser beams and a further one of the amplified coherent laser beams or between the one of the amplified coherent laser beams and at least one reference laser beam.

Abstract: A device for processing a workpiece using a laser beam of a laser includes a retarder plate and a focusing device. The retarder plate is configured to apply a first location-dependent phase retardation to a first part of the laser beam having a first input polarization, and to apply a second location-dependent phase retardation to a second part of the laser beam having a second input polarization. The focusing device is configured to focus the laser beam in at least one focus zone. A beam form of the laser beam in the focus zone is determined by the first location-dependent phase retardation and the second location-dependent phase retardation. The at least one focus zone at least partially overlaps with the workpiece. The workpiece is subjected to laser radiation in the at least one focus zone and is thus processed.

Abstract: An apparatus for forming a laser beam can include a controllable spatial light modulator, a control device for controlling the light modulator, and a beam guiding optical unit, wherein the control device is configured to split a display plane of the light modulator into a plurality of display regions and to represent a first beam influencing structure in at least one first display region of the plurality of display regions and a second beam influencing structure in a second display region of the plurality of display regions, wherein the beam guiding optical unit is configured to cause the laser beam to interact along the direction of propagation thereof firstly with the first display region and then with the second display region.

Abstract: A combination device includes at least two inputs and one or more outputs. Each input is for entry of a respective input beam. Each output is for exit of a respective output beam. The combination device is configured to form the respective output beam through a coherent combination of two input beams. The combination device is configured to set a polarization direction of the respective output beam based on a relative phase position of individual phases of the two input beams from which the respective output beam is formed through the coherent combination.

Abstract: An apparatus for influencing a laser beam from an ultrashort pulse laser includes a pulse-precise deflector unit configured to deflect the laser beam in at least one direction perpendicular to a beam propagation direction, a transformation optics arrangement having at least two components arranged downstream of the pulse-precise deflector unit. The transformation optics arrangement is configured to transform a spatial deflection and/or an angular deflection of the laser beam into the angular deflection and/or the spatial deflection, and/or transform the spatial deflection and the angular deflection inversely, by using a space-to-angle transformation and/or an angle-to-space transformation. The apparatus further includes a processing optical unit arranged downstream of the transformation optics arrangement and configured to guide the laser beam into an image-side focal plane of the processing optical unit.

Abstract: A device for machining a material using ultrashort laser pulses from a laser beam includes an input coupling system comprising an input coupling optical unit, a rotary system connected to the input coupling system and rotatable about an axis of rotation, and a machining optical unit connected to the rotary system and capable of being rotated together therewith and configured for guiding the laser beam into or onto the material to be machined. The input coupling optical unit is configured such that a laser beam is guided into a corresponding machining plane. A rotary optical unit of the rotary system and the machining optical unit are configured such that the corresponding machining plane is guided into a machining plane of the material to be machined. The device further includes a beam influencing system for positioning and/or shaping the laser beam in the corresponding machining plane.

Abstract: For material processing of a material, which is in particular for a laser beam to a large extent transparent, asymmetric shaped modifications are created transverse to the propagation direction of the laser beam. Thereby, the laser beam is shaped for forming an elongated focus zone in the material, wherein the focus zone is such that it includes at least one intensity maximum, which is transverse flattened in a flattening direction, or a transverse and/or axial sequence of asymmetric intensity maxima, which are flattened in a sequence direction. After positioning the focus zone in the material, a modification is created and the material and the focus zone are moved relative to each other in the or across to the flattening direction or in the or across to the sequence direction for forming a crack along an induced preferred direction.

Abstract: A method for machining a material using a pulsed laser includes introducing a sequence of laser pulses into the material for machining the material, and synchronizing a start of each sequence with a fundamental frequency of the laser. The sequence of laser pulses comprises at least two different sequence elements that are offset from one another in space and time. Each sequence element comprises an individual laser pulse, a specific succession of individual laser pulses, or a burst of laser pulses. Specific sequence element properties are impressed on each sequence element. The sequence element properties comprise a position of the laser focus of a respective sequence element. The position of the laser focus of each sequence element of the sequence is adapted for each sequence element.

Abstract: Disclosed is a cooling module having a first fluid circuit with a cold generator, the components of the first fluid circuit being arranged in an insulated housing. At least one component of the first fluid circuit is coupled to at least one section of a second fluid circuit, which section runs in the housing, wherein said housing includes connections for the at least one second fluid circuit, and a negative pressure prevails in the housing.

Abstract: A processing optical unit for workpiece processing includes a birefringent polarizer configured to split at least one input laser beam into a pair of partial beams polarized perpendicularly to one another. The processing optical unit further includes a focusing optical unit arranged downstream of the birefringent polarizer in the beam path and configured to focus the pair of partial beams onto focus zones in a focal plane. The processing optical unit is configured to produce at least partly overlapping focus zones of the pair of partial beams.

Abstract: An apparatus for forming a laser beam can include a controllable spatial light modulator, a control device for controlling the light modulator, and a beam guiding optical unit, wherein the control device is configured to split a display plane of the light modulator into a plurality of display regions and to represent a first beam influencing structure in at least one first display region of the plurality of display regions and a second beam influencing structure in a second display region of the plurality of display regions, wherein the beam guiding optical unit is configured to cause the laser beam to interact along the direction of propagation thereof firstly with the first display region and then with the second display region.

Abstract: A diffractive optical beam shaping element for imposing a phase distribution on a laser beam that is intended for laser processing of a material includes a phase mask that is shaped as an area and is configured for imposing a plurality of beam shaping phase distributions on the laser beam incident on to the phase mask. A virtual optical image is attributed to at least one of the plurality of beam shaping phase distributions, wherein the virtual image can be imaged into an elongated focus zone for creating a modification in the material to be processed. Multiple such elongated focus zones can spatially add up and interfere with each other, to modify an intensity distribution in the material and, for example, generate an asymmetric modification zone.

Abstract: For material processing of a material, which is in particular for a laser beam to a large extent transparent, asymmetric shaped modifications are created transverse to the propagation direction of the laser beam. Thereby, the laser beam is shaped for forming an elongated focus zone in the material, wherein the focus zone is such that it includes at least one intensity maximum, which is transverse flattened in a flattening direction, or a transverse and/or axial sequence of asymmetric intensity maxima, which are flattened in a sequence direction. After positioning the focus zone in the material, a modification is created and the material and the focus zone are moved relative to each other in the or across to the flattening direction or in the or across to the sequence direction for forming a crack along an induced preferred direction.

Abstract: For material processing of a material, which is in particular for a laser beam to a large extent transparent, asymmetric shaped modifications are created transverse to the propagation direction of the laser beam. Thereby, the laser beam is shaped for forming an elongated focus zone in the material, wherein the focus zone is such that it includes at least one intensity maximum, which is transverse flattened in a flattening direction, or a transverse and/or axial sequence of asymmetric intensity maxima, which are flattened in a sequence direction. After positioning the focus zone in the material, a modification is created and the material and the focus zone are moved relative to each other in the or across to the flattening direction or in the or across to the sequence direction for forming a crack along an induced preferred direction.

Abstract: An optical system for shaping a laser beam includes a beam shaping element configured to receive the laser beam having a transverse input intensity profile and to impose a beam shaping phase distribution onto the laser beam. The optical system further includes a near field optical element, arranged downstream of the beam shaping element at a beam shaping distance and is configured to focus the laser beam into the focus zone. The imposed phase distribution results in a virtual optical image of the elongated focus zone located before the beam shaping element. The beam shaping distance corresponds to a propagation length of the laser beam within which the imposed phase distribution transforms the transverse input intensity profile into a transverse output intensity profile at the near field optical element.

Abstract: A diffractive optical beam shaping element for imposing a phase distribution on a laser beam that is intended for laser processing of a material includes a phase mask that is shaped as an area and is configured for imposing a plurality of beam shaping phase distributions on the laser beam incident on to the phase mask. A virtual optical image is attributed to at least one of the plurality of beam shaping phase distributions, wherein the virtual image can be imaged into an elongated focus zone for creating a modification in the material to be processed. Multiple such elongated focus zones can spatially add up and interfere with each other, to modify an intensity distribution in the material and, for example, generate an asymmetric modification zone.

Abstract: An optical system for shaping a laser beam includes a beam shaping element configured to receive the laser beam having a transverse input intensity profile and to impose a beam shaping phase distribution onto the laser beam. The optical system further includes a near field optical element, arranged downstream of the beam shaping element at a beam shaping distance and is configured to focus the laser beam into the focus zone. The imposed phase distribution results in a virtual optical image of the elongated focus zone located before the beam shaping element. The beam shaping distance corresponds to a propagation length of the laser beam within which the imposed phase distribution transforms the transverse input intensity profile into a transverse output intensity profile at the near field optical element.