Patents by Inventor Daniel Guhr

Daniel Guhr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of assembling a facet mirror of an optical system
    Patent number: 11841620
    Abstract: A method of assembling a facet mirror of an optical system, in which facets of the facet mirror are imaged onto a field plane of the optical system, includes: a) determining positions of the facets of the facet mirror relative to interfaces of the facet mirror, with the aid of which the facet mirror is able to be connected to a support structure; b) calculating an actual position of an object field of the optical system arising for the facet mirror in the field plane; and c) arranging spacers between the interfaces and the support structure so that the object field in the field plane is brought from the calculated actual position to a target position.
    Type: Grant
    Filed: November 17, 2022
    Date of Patent: December 12, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Andreas Königer, Ulrich Müller, Daniel Guhr
  • METHOD OF ASSEMBLING A FACET MIRROR OF AN OPTICAL SYSTEM
    Publication number: 20230161266
    Abstract: A method of assembling a facet mirror of an optical system, in which facets of the facet mirror are imaged onto a field plane of the optical system, includes: a) determining positions of the facets of the facet mirror relative to interfaces of the facet mirror, with the aid of which the facet mirror is able to be connected to a support structure; b) calculating an actual position of an object field of the optical system arising for the facet mirror in the field plane; and c) arranging spacers between the interfaces and the support structure so that the object field in the field plane is brought from the calculated actual position to a target position.
    Type: Application
    Filed: November 17, 2022
    Publication date: May 25, 2023
    Inventors: Andreas KÖNIGER, Ulrich MÜLLER, Daniel GUHR
  • Casing for a measuring instrument
    Patent number: D841488
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: February 26, 2019
    Assignee: Turck Holding GmbH
    Inventor: Daniel Guhr