Patents by Inventor Daniel H. Cotter

Daniel H. Cotter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7863996
    Abstract: An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
    Type: Grant
    Filed: September 24, 2008
    Date of Patent: January 4, 2011
    Assignee: MKS Instruments, Inc.
    Inventors: Daniel H. Cotter, Sean O. Harnett
  • Publication number: 20100073104
    Abstract: An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
    Type: Application
    Filed: September 24, 2008
    Publication date: March 25, 2010
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Daniel H. Cotter, Sean O. Harnett