Abstract: An approach is developed to use an acidic rinse to reduce charge during the lithographic process, and thereby eliminate the crystalline damage and associated yield loss associated with the accumulated charge. The crystalline damage has been found to occur for certain thicknesses of dielectric layers, and such damage is irreparable. A sparge can be used to dissolve carbon dioxide in water to provide a weak acidic rinse.

Abstract: The present invention provides an apparatus for the mixing or dilution of chemicals from one more sources that have been analyzed using laboratory analysis or an insitu-analyzer for concentration or molarity. The chemical is then transferred to a series of precisely calibrated vessels each of have a volume 10% of the next vessel. For example the main vessel may be 1 L in volume and the second vessel is 0.1 L in volume, the third is 0.01 L in volume and the fourth is 0.001 L in volume. The present system utilizes these two or more metered vessels which are connected to bulk chemical sources via intake lines. Each metered vessel contains an overflow tube, which drains any excess chemical by gravity flow from the metered vessel so as to adjust the chemical amount to a pre-calibrated desired level.