Patents by Inventor Daniel HADA

Daniel HADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition apparatus, method of deposition on a substrate, substrate structure and substrate support
    Patent number: 12400891
    Abstract: A deposition apparatus includes a first substrate support for supporting a substrate in a substantially vertical orientation. The substrate has a first main surface, a second main surface opposite the first main surface and a side surface between the first main surface and the second main surface. The deposition apparatus includes a first deposition device for depositing a first conductive pattern or a first resist mask on the side surface of the substrate while the substrate is supported in the substantially vertical orientation by the first substrate support.
    Type: Grant
    Filed: March 19, 2019
    Date of Patent: August 26, 2025
    Assignee: APPLIED MATERIALS ITALIA S.R.L.
    Inventors: Francesca Antoniolli, Marco D'Acunzo, Marco Galiazzo, Daniel Hada
  • DEPOSITION APPARATUS, METHOD OF DEPOSITION ON A SUBSTRATE, SUBSTRATE STRUCTURE AND SUBSTRATE SUPPORT
    Publication number: 20220157629
    Abstract: A deposition apparatus includes a first substrate support for supporting a substrate in a substantially vertical orientation. The substrate has a first main surface, a second main surface opposite the first main surface and a side surface between the first main surface and the second main surface. The deposition apparatus includes a first deposition device for depositing a first conductive pattern or a first resist mask on the side surface of the substrate while the substrate is supported in the substantially vertical orientation by the first substrate support.
    Type: Application
    Filed: March 19, 2019
    Publication date: May 19, 2022
    Inventors: Francesca ANTONIOLLI, Marco D'ACUNZO, Marco GALIAZZO, Daniel HADA