Abstract: A device for an MeV-based ion beam analysis of a sample includes a vacuum measurement chamber, having at least one detector and a sample observation unit, a vacuum system for generating a vacuum within the vacuum measurement chamber, and an ion beam tube and a focusing system for focusing an ion beam. The device further includes a sample transfer system, comprising a sample manipulator including a sample holder for receiving at least one sample. The device additionally includes an in-coupling system for the vacuum-tight connection of the ion beam tube to the measurement chamber, which comprises an ion beam vacuum feedthrough, at least one receiver for a detector, a receiver for receiving the sample observation unit, and a receiver for receiving the sample transfer system. The in-coupling system represents a direct mechanical connection between the components that are the ion lens system, detector and sample observation unit.

Abstract: A device for an MeV-based ion beam analysis of a sample includes a vacuum measurement chamber, having at least one detector and a sample observation unit, a vacuum system for generating a vacuum within the vacuum measurement chamber, and an ion beam tube and a focusing system for focusing an ion beam. The device further includes a sample transfer system, comprising a sample manipulator including a sample holder for receiving at least one sample. The device additionally includes an in-coupling system for the vacuum-tight connection of the ion beam tube to the measurement chamber, which comprises an ion beam vacuum feedthrough, at least one receiver for a detector, a receiver for receiving the sample observation unit, and a receiver for receiving the sample transfer system. The in-coupling system represents a direct mechanical connection between the components that are the ion lens system, detector and sample observation unit.

Abstract: A rotary feedthrough includes a first shaft connected to a first gear via a coupling and a second shaft configured to be mounted in a housing and fixedly connected to a second gear. One of the first gear and the second gear is an external gear with i teeth and the other of the first gear and the second gear is an internal gear with i+x teeth, where i=3, 4 . . . n and x=1, 2 . . . n. The external gear is arranged inside the internal gear. The rotary feedthrough further includes a coupling configured to couple a gear to the first shaft in such a way that a rotational movement of the shaft leads to an eccentric movement of the gear coupled thereto. In addition, the rotary feedthrough includes a seal configured to connect the gear coupled to the first shaft to the housing.