Abstract: A process and system scribe sapphire substrates, by performing the steps of mounting a sapphire substrate, carrying an array of integrated device die, on a stage such as a movable X-Y stage including a vacuum chuck; and directing UV pulses of laser energy directed at a surface of the sapphire substrate using a solid state laser and locating edges of the substrate. The cutting is stopped based on the edge location, to prevent impacting background elements. The pulses of laser energy have a wavelength below about 560 nanometers, and preferably between about 150 in 560 nanometers. In addition, energy density, spot size, and pulse duration are established at levels sufficient to induce ablation of sapphire.

Abstract: An optical cavity for a flash lamp pumped dye laser including a pumping cavity, a birefringent filter and a plurality of frequency doubling crystals. Within the pumping cavity the flash lamp is cooled by forced air convection and operated with a D.C. simmer current. Simultaneously, the dye carrying conduit within the pumping cavity is cooled with water. The operating life of the dye is increased by using selectable filters to remove the ultraviolet radiation eminating from the flash lamp before it falls on the dye. The construction of the pumping cavity permits changing the flash lamp and the dye conduit without disturbing the optical path of the laser.