Patents by Inventor Daniel J. Vona

Daniel J. Vona has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7133921
    Abstract: A communications interface system and method for a plasma generator is provided. The communications interface system includes a power delivery system component that has a standard POD interface for communicating information that complies with a first protocol. A portable device is coupled between the standard POD interface and a second communication interface for communicating information therebetween. The second communication interface communicates information in a format that complies with a second protocol. The portable device is detachable from the standard POD interface and the second communication interface. A first communication link couples the standard POD interface to the portable device. A second communication link couples the portable device to the second communication interface.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: November 7, 2006
    Assignee: MKS Instruments, Inc.
    Inventors: Kevin P. Nasman, Daniel J. Vona, Jr.
  • Patent number: 6700092
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Grant
    Filed: August 23, 2002
    Date of Patent: March 2, 2004
    Assignee: ENI Technology, Inc.
    Inventors: Daniel J. Vona, Jr., Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus, Jr.
  • Publication number: 20030024907
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Application
    Filed: August 23, 2002
    Publication date: February 6, 2003
    Inventors: Daniel J. Vona, Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus
  • Publication number: 20020144983
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Application
    Filed: April 6, 2001
    Publication date: October 10, 2002
    Inventors: Daniel J. Vona, Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus
  • Publication number: 20020147852
    Abstract: A communications interface system and method for a plasma generator is provided. The communications interface system includes a power delivery system component that has a standard POD interface for communicating information that complies with a first protocol. A portable device is coupled between the standard POD interface and a second communication interface for communicating information therebetween. The second communication interface communicates information in a format that complies with a second protocol. The portable device is detachable from the standard POD interface and the second communication interface. A first communication link couples the standard POD interface to the portable device. A second communication link couples the portable device to the second communication interface.
    Type: Application
    Filed: April 6, 2001
    Publication date: October 10, 2002
    Inventors: Kevin P. Nasman, Daniel J. Vona
  • Patent number: 6459067
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: October 1, 2002
    Assignee: ENI Technology, Inc.
    Inventors: Daniel J. Vona, Jr., Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus, Jr.