Patents by Inventor Daniel Joseph McKee

Daniel Joseph McKee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Oxidation of silicon using fluorine implant
    Patent number: 6358865
    Abstract: A method is disclosed for the oxidation of a substrate and the formation of oxide regions in the substrate by implantation of fluorine into the silicon lattice and subsequently forming an oxide region by a typical oxide growth process. The oxide growth process may be those such as thermal oxidation or the local oxidation of silicon. The process according to the present invention allows for the simultaneous growth of oxides having different thicknesses at the same time by tailoring the fluorine implantation.
    Type: Grant
    Filed: May 14, 1999
    Date of Patent: March 19, 2002
    Assignee: Agere Systems Guardian Corp.
    Inventors: Charles Walter Pearce, Daniel Joseph McKee, Jeffrey Kenneth Haas
  • OXIDATION OF SILICON USING FLUORINE IMPLANTS
    Publication number: 20020001972
    Abstract: A method is disclosed for the oxidation of a substrate and the formation of oxide regions in the substrate by implantation of fluorine into the silicon lattice and subsequently forming an oxide region by a typical oxide growth process. The oxide growth process may be those such as thermal oxidation or the local oxidation of silicon. The process according to the present invention allows for the simultaneous growth of oxides having different thicknesses at the same time by tailoring the fluorine implantation.
    Type: Application
    Filed: May 14, 1999
    Publication date: January 3, 2002
    Inventors: CHARLES WALTER PEARCE, DANIEL JOSEPH MCKEE, JEFFREY KENNETH HAAS