Patents by Inventor Daniel L. Birx

Daniel L. Birx has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6728284
    Abstract: A multi-stage magnetic modulator provides a pulse train of ±40 kV electrical pulses at a 5-7 kHz repetition rate to a metal vapor laser. A fractional turn transformer steps up the voltage by a factor of 80 to 1 and magnetic pulse compression is used to reduce the pulse width of the pulse train. The transformer is fabricated utilizing a rod and plate stack type of construction to achieve a high packing factor. The pulses are controlled by an SCR stack where a plurality of SCRs are electrically connected in parallel, each SCR electrically connected to a saturable inductor, all saturable inductors being wound on the same core of magnetic material for enhanced power handling characteristics.
    Type: Grant
    Filed: June 8, 1993
    Date of Patent: April 27, 2004
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Daniel L. Birx, Don G. Ball, Edward G. Cook
  • Patent number: 6586757
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: July 1, 2003
    Assignee: Cymer, Inc.
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx late of, Richard L. Sandstrom, John E. Rauch
  • Patent number: 6566667
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. Preferably the electrodes are configured co-axially with the anode on the axis. The anode is preferably hollow and the active gas is introduced through the anode. This permits an optimization of the spectral line source and a separate optimization of the buffer gas. Preferred embodiments present optimization of capacitance values, anode length and shape and preferred active gas delivery systems are disclosed.
    Type: Grant
    Filed: October 16, 2000
    Date of Patent: May 20, 2003
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Daniel L. Birx
  • Patent number: 6566668
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: May 20, 2003
    Assignee: Cymer, Inc.
    Inventors: John E. Rauch, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx, Richard L. Sandstrom, Stephan T. Melnychuk
  • Patent number: 6541786
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. A working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharge between the electrodes to produce very high temperature, high density plasma pinch in the working gas providing radiation at the spectral line of the active gas. An external reflection radiation collector-director collects radiation produced in the plasma pinches and directs the radiation in a desired direction. In a preferred embodiment the active gas is lithium and the buffer gas is helium and the radiation collector-director is coated with the material used for the electrodes. A good choice for the material is tungsten.
    Type: Grant
    Filed: June 2, 1999
    Date of Patent: April 1, 2003
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Igor V. Fomenkov, Daniel L. Birx
  • Patent number: 6452199
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the active gas. A blast shield positioned just beyond the location of the high density pinch provides a physical barrier which confines the pinch limiting its axial elongation. A small port is provided in the blast shield that permits the radiation but not the plasma to pass through the shield. In a preferred embodiment a surface of the shield facing the plasma is dome-shaped.
    Type: Grant
    Filed: November 18, 1999
    Date of Patent: September 17, 2002
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Igor V. Fomenkov, Daniel L. Birx
  • Patent number: 6442181
    Abstract: A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater.
    Type: Grant
    Filed: October 6, 2000
    Date of Patent: August 27, 2002
    Assignee: Cymer, Inc.
    Inventors: I. Roger Oliver, William N. Partlo, Richard M. Ness, Richard L. Sandstrom, Stuart L. Anderson, Alex P. Ivaschenko, James K. Howey, Vladimir Kulgeyko, Jean-Marc Hueber, Daniel L. Birx
  • Publication number: 20020100882
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the active gas. A blast shield positioned just beyond the location of the high density pinch provides a physical barrier which confines the pinch limiting its axial elongation. A small port is provided in the blast shield that permits the radiation but not the plasma to pass through the shield. In a preferred embodiment a surface of the shield facing the plasma is dome-shaped.
    Type: Application
    Filed: November 18, 1999
    Publication date: August 1, 2002
    Inventors: WILLIAM N. PARTLO, IGOR V. FOMENKOV, DANIEL L. BIRX
  • Publication number: 20020014599
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Application
    Filed: June 6, 2001
    Publication date: February 7, 2002
    Inventors: John E. Rauch, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx, Richard L. Sandstrom, Stephan T. Melnychuk
  • Publication number: 20020014598
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Application
    Filed: June 6, 2001
    Publication date: February 7, 2002
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx, Richard L. Sandstrom, John E. Rauch
  • Patent number: 6240112
    Abstract: A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 4000 charges per second. In a preferred embodiment capable of operating at pulse rates of 2000 to 4000 Hz or greater, water cooling of the saturable inductors is provided.
    Type: Grant
    Filed: December 22, 1999
    Date of Patent: May 29, 2001
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
  • Patent number: 6151346
    Abstract: A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
    Type: Grant
    Filed: August 9, 1999
    Date of Patent: November 21, 2000
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
  • Patent number: 6064072
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. A working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltage high enough to create electrical discharge between the electrodes to produce very high temperature, high density plasma pinch in the working gas providing radiation at the spectral line of the active gas. An external reflection radiation collector-director collects radiation produced in the plasma pinches and directs the radiation in a desired direction. In a preferred embodiment the active gas is lithium and the buffer gas is helium and the radiation-collector is coated with the material used for the electrodes. A good choice for the material is tungsten.
    Type: Grant
    Filed: March 15, 1999
    Date of Patent: May 16, 2000
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Igor V. Fomenkov, Daniel L. Birx
  • Patent number: 6028872
    Abstract: A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated resonant power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
    Type: Grant
    Filed: December 15, 1998
    Date of Patent: February 22, 2000
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
  • Patent number: 5940421
    Abstract: A simple, novel pulse power circuit is described, which improves the net coupling efficiency of a pulse power system used to drive a gas discharge laser, and minimizes current reversal and electrode erosion. The circuit, in accordance with an embodiment of the present invention, incorporates a saturable inductor. Contrary to conventional saturable inductor configurations, in which the saturable inductor is either not saturated or is presaturated in a reverse direction, in the present circuit the saturable inductor is presaturated in the forward direction.The saturable inductor is inserted between the final stage capacitor of a pulse power circuit and a gas discharge load, where it allows forward current but effectively blocks reverse current through the load. Elimination of reverse discharge current reduces electrode erosion and improves discharge chamber life.
    Type: Grant
    Filed: December 15, 1997
    Date of Patent: August 17, 1999
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Daniel L. Birx, Richard M. Ness
  • Patent number: 5936988
    Abstract: A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
    Type: Grant
    Filed: July 18, 1998
    Date of Patent: August 10, 1999
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
  • Patent number: 5914974
    Abstract: A high voltage pulse power generating circuit capable of eliminating secondary pulses due to stage mismatch in the stages of its magnetic pulse compressor circuit is disclosed. The pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a nonlinear magnetic compressor circuit. A mismatch correction circuit coupled to each stage of the compressor circuit discharges the reflected energy due to stage mismatch and thus eliminates the reflected energy from being launched back into the load. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes a diode and a resistor that is coupled to each stage of the magnetic pulse compressor circuit. Various embodiments are disclosed.
    Type: Grant
    Filed: February 21, 1997
    Date of Patent: June 22, 1999
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Richard L. Sandstrom, Daniel L. Birx, Richard Mons Ness
  • Patent number: 5729562
    Abstract: A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.
    Type: Grant
    Filed: October 31, 1996
    Date of Patent: March 17, 1998
    Assignees: Cymer, Inc., Advanced Pulse Power Technologies, Inc.
    Inventors: Daniel L. Birx, Palash P. Das, Igor V. Fomenkov, William N. Partlo, Tom A. Watson
  • Patent number: 5448580
    Abstract: A compact high power magnetic compression apparatus and method for delivering high voltage pulses of short duration at a high repetition rate and high peak power output which does not require the use of environmentally unacceptable fluids such as chlorofluorocarbons either as a dielectric or as a coolant, and which discharges very little waste heat into the surrounding air. A first magnetic switch has cooling channels formed therethrough to facilitate the removal of excess heat. The first magnetic switch is mounted on a printed circuit board. A pulse transformer comprised of a plurality of discrete electrically insulated and magnetically coupled units is also mounted on said printed board and is electrically coupled to the first magnetic switch. The pulse transformer also has cooling means attached thereto for removing heat from the pulse transformer. A second magnetic switch also having cooling means for removing excess heat is electrically coupled to the pulse transformer.
    Type: Grant
    Filed: July 5, 1994
    Date of Patent: September 5, 1995
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Daniel L. Birx, Phillip A. Arnold, Don G. Ball, Edward G. Cook
  • Patent number: 5319665
    Abstract: A high power electromagnetic pulse driver for generating sub-microsecond rise time pulses having energy contents greater than 1 joule includes an electromagnetic pulse compressor and an electromagnetic shock line for compressing the leading edges of those pulses. The shock line may use non-linear materials whose permeability or permittivity vary greatly with varying field strength. One material whose permeability varies by a useful amount is metglass, an amorphous alloy of silicon and iron. The high power electromagnetic pulse driver may drive gas discharge lasers.
    Type: Grant
    Filed: November 6, 1992
    Date of Patent: June 7, 1994
    Assignee: Science Research Laboratory
    Inventor: Daniel L. Birx