Abstract: A storage system and method of storing articles is for use in appliances defining an interior space having a predetermined height, width, and depth. A plurality of containers are provided, each of the containers being adapted and constructed to receive articles to be stored in the appliance. Each of the containers has a substantially open top, and a height such that a plurality of containers can be stacked atop one another within the height of the interior of the appliance, a width such that a plurality of containers can be placed adjacent one another within the width of the interior of the appliance, and a depth such that a plurality of containers can be placed adjacent one another within the width of the interior of the appliance. Articles to be stored in the appliance are placed in the containers, and the containers adjacent to one another, and stacked atop one another, in the interior of the appliance.

Abstract: A semiconductor processor including an enclosure with an access opening. A door assembly is supported for translational movement between aligned and displaced positions relative to the access opening. The door assembly has a main part, and an extension part which telescopically moves toward and away from the access opening. A bellows is provided between the main and extension parts. The closed door is sealed by a first face seal and a second expandable seal. A liquids trap is provided to prevent outward escape of liquids from the access opening. A drain removes liquid collected in the trap.

Abstract: A semiconductor processor including an enclosure with an access opening. A door assembly is supported for translational movement between aligned and displaced positions relative to the access opening. The door assembly has a main part, and an extension part which telescopically moves toward and away from the access opening. A bellows is provided between the main and extension parts. The closed door is sealed by a first face seal and a second expandable seal. A liquids trap is provided to prevent outward escape of liquids from the access opening. A drain removes liquid collected in the trap.

Abstract: A door assembly for semiconductor processing equipment used to treat semiconductor substrates, wafers, photomasks, data disks, and other units. The door assembly is mounted to the front wall of a semiconductor processor enclosure having an access opening by means of a pair of guide rods and corresponding sliding bushings connected to the door which encircle the rods to allow movement of the door along the guide rods. A magnetic rodless piston mounted in an actuator bushing block which is magnetically coupled to an actuator bushing block moves the door assembly along the guide rods. The door assembly telescopically moves toward and away from the access opening to allow units to be installed into and removed from the enclosure, and to close the access opening. A window including an expandable seal is secured to an extension piece of the telescoping door assembly to seal between the door assembly and the access opening.