Patents by Inventor Daniel L. Harrison

Daniel L. Harrison has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer probe station
    Patent number: 6803756
    Abstract: The invention relates to a chuck apparatus for a wafer probe station in which the central conductive surface supports a device-under-test (DUT) over a conductive lower chuck portion. An insulator positions the center conductor surface of the chuck above the lower chuck portion and also positions an electrically isolated conductor along its periphery. A laterally extending shielding element is provided for shielding electromagnetic interference (EMI) from the center conductor surface and the lower chuck portion. The electrically isolated conductor and the conductive lower chuck portion may cooperate to form a line-of-sight electrical barrier between the center conductor surface and the laterally extending shielding element. The invention further relates to methods of manufacturing the chuck apparatus and using the apparatus to accomplish low current and voltage tests in a probe station.
    Type: Grant
    Filed: April 29, 2002
    Date of Patent: October 12, 2004
    Assignee: The Micromanipulator Company, Inc.
    Inventors: Kenneth F. Hollman, Daniel L. Harrison
  • Wafer probe station
    Publication number: 20020118009
    Abstract: The invention relates to a chuck apparatus for a wafer probe station in which the central conductive surface supports a device-under-test (DUT) over a conductive lower chuck portion. An insulator positions the center conductor surface of the chuck above the lower chuck portion and also positions an electrically isolated conductor along its periphery. A laterally extending shielding element is provided for shielding electromagnetic interference (ENI) from the center conductor surface and the lower chuck portion. The electrically isolated conductor and the conductive lower chuck portion max cooperate to form a line-of-sight electrical barrier between the center conductor surface and the laterally extending shielding element. The invention further relates to methods of manufacturing the chuck apparatus and using the apparatus to accomplish low current and voltage tests in a probe station.
    Type: Application
    Filed: April 29, 2002
    Publication date: August 29, 2002
    Applicant: The Micromanipulator Company, Inc.
    Inventors: Kenneth F. Hollman, Daniel L. Harrison
  • Wafer probe station
    Patent number: 6424141
    Abstract: The invention relates to a chuck apparatus for a wafer probe station in which the central conductive surface supports a device-under-test (DUT) over a conductive lower chuck portion. An insulator positions the center conductor surface of the chuck above the lower chuck portion and also positions an electrically isolated conductor along its periphery. A laterally extending shielding element is provided for shielding electromagnetic interference (EMI) from the center conductor surface and the lower chuck portion. The electrically isolated conductor and the conductive lower chuck portion may cooperate to form a line-of-sight electrical barrier between the center conductor surface and the laterally extending shielding element The invention further relates to methods of manufacturing the chuck apparatus and using the apparatus to accomplish low current and voltage tests in a probe station.
    Type: Grant
    Filed: July 13, 2000
    Date of Patent: July 23, 2002
    Assignee: The Micromanipulator Company, Inc.
    Inventors: Kenneth F. Hollman, Daniel L. Harrison