Abstract: To fabricate high aspect ratio metal structures, a two-layer structure is provided on a conductive layer. The two-layer structure includes a first layer adjacent the conductive layer and a second layer adjacent the first layer where the second layer is etchable by a Deep Reactive Ion Etching (DRIE) process. Using the DRIE process, at least one selected region of the second layer is completely etched away with the selected region being at least partially aligned with a region of the conductive layer such that the first layer is then exposed thereover. The first layer so-exposed is then removed to expose the region of the conductive layer thereunder. Metal is electroplated onto the exposed conductive layer and any remaining portions of the two-layer structure are then removed.

Abstract: The present disclosure provides a microelectromechanical systems (MEMS) igniter which is an ignition safety device (ISD) in a small, low-cost, low-power, and highly reliable design. The MEMS igniter provides both out-of-line safety and an ignition mechanism for a rocket motor. The igniter is initially held in a safe, out-of-line position with respect to a propellant. Upon receiving appropriate arm and fire commands and sensing the correct environment, MEMS mechanisms move an ignition component into alignment and the device can function.

Abstract: A projectile includes a projectile body including a flow surface; the flow surface including at least one control surface formed therein. The controls surface is formed continuous with the flow surface, and a pressure source is connected to at least one control surface. The pressure source delivers a pressure to at least one control surface to cause at least one control surface to bulge away from the flow surface.

Abstract: A thermoelectric actuator moves in a first direction and an opposite direction upon the application and removal of a current. An actuator means is driven by the thermoelectric actuator and includes a set of drive teeth. The drive teeth engage with a first set of teeth on a slider member to move it to a desired position. A spring biases the slider back to an initial position. A keeper arrangement, having teeth that engage a second set of teeth on the slider, maintains the slider in its advanced position and prevents it from going back to its initial position.

Abstract: A MEMS resettable timer including a primary inertial element and at least one secondary inertial element, which includes a camming surface. When the secondary inertial element moves, its camming surface engages the camming surface of a locking element to remove it from the notch of a subsequent inertial element. When the primary inertial element is released for movement it activates a resetting arrangement to place the secondary inertial element back to the initial position and prevent further movement of the primary inertial element. The cycle is repeatable to commence some predetermined action.

Abstract: The invention comprises a micromechanical shock sensor that is formed on the surface of a micro-substrate. A moveable proof mass is formed on the surface with at least one spring connected to the proof mass and the surface. The spring allows the proof mass to move a predetermined distance. Latching means are formed on the surface the predetermined distance from the proof mass. When the sensor is subjected to a sufficient shock, the proof mass moves and contacts the latching means. An indicator means is provided to allow this contact to be readily known by the user.