Patents by Inventor Daniel M. Cotton

Daniel M. Cotton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optics landing system and method therefor
    Patent number: 6828811
    Abstract: A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The proximity sensor is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.
    Type: Grant
    Filed: September 26, 2002
    Date of Patent: December 7, 2004
    Assignee: Credence Systems Corporation
    Inventors: John Hanson, Jonathan Frank, Dario Meluzzi, Daniel M. Cotton
  • Optics landing system and method therefor
    Publication number: 20030193345
    Abstract: A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The proximity sensor is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.
    Type: Application
    Filed: September 26, 2002
    Publication date: October 16, 2003
    Inventors: John Hanson, Jonathan Frank, Dario Meluzzi, Daniel M. Cotton