Patents by Inventor Daniel M. Deyo

Daniel M. Deyo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Guard for electrostatic chuck
    Patent number: 6944006
    Abstract: A guard for an electrostatic chuck includes a ceramic annulus that has an inner surface shaped to fit around a circumference of the electrostatic chuck, and an outer surface having (i) a top portion with a recessed trench and (ii) a side portion. A metal coating is provided on the top portion of the outer surface.
    Type: Grant
    Filed: April 3, 2003
    Date of Patent: September 13, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Hui Zheng, Kenneth Tsai, Hong Wang, Yongxiang He, Jesus G. Garcia, III, Daniel M. Deyo
  • Guard for electrostatic chuck
    Publication number: 20040196613
    Abstract: A guard for an electrostatic chuck includes a ceramic annulus that has an inner surface shaped to fit around a circumference of the electrostatic chuck, and an outer surface having (i) a top portion with a recessed trench and (ii) a side portion. A metal coating is provided on the top portion of the outer surface.
    Type: Application
    Filed: April 3, 2003
    Publication date: October 7, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Hui Zheng, Kenneth Tsai, Hong Wang, Yongxiang He, Jesus G. Garcia, Daniel M. Deyo