Abstract: An automated acoustic micro imaging system includes a part-storage station favoring a dry environment, a part-transport robot, and a wet-environment inspection station. The wet-environment inspection station has an ultrasonic beam generator, a coupling fluid in which parts are inspected, and a part-retention stage. A moisture barrier is located between the wet-environment inspection station and the part-storage station favoring a dry environment. The inspection station includes a kinematic, quick-change part-retaining chuck and robotic means for interchanging chucks. Automatic acoustic micro imaging methods are disclosed.

Abstract: An improved tray-scanning station for a tray-fed scanning acoustic microscope prevents the dislodging of small, loosely held parts from the trays by coupling fluid as the trays pass through an inspection station, or by the action of a dryer as the trays pass through a drying station.

Abstract: A controlled-immersion inspection mechanism gradually immerses a planar pattern of integrated circuits or other articles into a tank filled with water to a given level; across the tank there are two spaced parallel guide tracks along which two carriages, connected by a platform, move from an entry position above the water to an inspection position. In the inspection position the platform supports the articles, in an orderly array, for scanning inspection by a focussed energy beam, preferably an ultrasonic beam. A platform drive drives the platform between its entry and inspection positions. A mesh or other removable cover that permits water to flow but stabilizes article positions may cover the articles during immersion; the mesh is usually removed before scanning.