Patents by Inventor Daniel M. Gill
Daniel M. Gill has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11531312Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.Type: GrantFiled: April 16, 2021Date of Patent: December 20, 2022Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
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Publication number: 20210311448Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.Type: ApplicationFiled: April 16, 2021Publication date: October 7, 2021Applicant: MKS Instruments, Inc.Inventors: David J. COUMOU, Yuriy ELNER, Aung TOE, Daniel M. GILL, Eldridge M. MOUNT, IV, Shaun SMITH
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Patent number: 11042140Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.Type: GrantFiled: March 11, 2019Date of Patent: June 22, 2021Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
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Patent number: 11009843Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.Type: GrantFiled: March 11, 2019Date of Patent: May 18, 2021Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
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Patent number: 10692698Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: GrantFiled: July 11, 2019Date of Patent: June 23, 2020Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill, Richard Pham
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Patent number: 10666206Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: GrantFiled: December 19, 2017Date of Patent: May 26, 2020Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill
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Publication number: 20190391547Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.Type: ApplicationFiled: March 11, 2019Publication date: December 26, 2019Applicant: MKS Instruments, Inc.Inventors: David J. COUMOU, Yuriy ELNER, Aung TOE, Daniel M. GILL, Eldridge M. MOUNT, IV, Shaun SMITH
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Publication number: 20190333738Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: ApplicationFiled: July 11, 2019Publication date: October 31, 2019Applicant: MKS Instruments, Inc.Inventors: David J. COUMOU, Ross REINHARDT, Yuriy ELNER, Daniel M. GILL, Richard PHAM
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Patent number: 10395895Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: GrantFiled: August 27, 2015Date of Patent: August 27, 2019Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill, Richard Pham
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Publication number: 20180109230Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: ApplicationFiled: December 19, 2017Publication date: April 19, 2018Inventors: David J. COUMOU, Ross REINHARDT, Yuriy ELNER, Daniel M. GILL
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Patent number: 9876476Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: GrantFiled: August 18, 2015Date of Patent: January 23, 2018Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill
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Patent number: 9721758Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates a plurality of RF output signals. The matching network includes a ratio tuning element to vary a ratio of power between the plurality of RF output signals. The first controller communicates a ratio control signal to the matching network, and the matching network controls the ratio tuning element in accordance with the ratio control signal. The RF controls system operates in a continuous and pulse mode of operation. The controller can also control the rise or fall of a pulse edge or a level or duration of incremental changes in the pulse edge.Type: GrantFiled: July 13, 2015Date of Patent: August 1, 2017Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuiry Elner, Daniel M. Gill
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Publication number: 20170062186Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: ApplicationFiled: August 27, 2015Publication date: March 2, 2017Inventors: David J. COUMOU, Ross REINHARDT, Yuiry ELNER, Daniel M. GILL, Richard PHAM
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Publication number: 20170054418Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: ApplicationFiled: August 18, 2015Publication date: February 23, 2017Inventors: David J. COUMOU, Ross REINHARDT, Yuiry ELNER, Daniel M. GILL
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Publication number: 20170018926Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates a plurality of RF output signals. The matching network includes a ratio tuning element to vary a ratio of power between the plurality of RF output signals. The first controller communicates a ratio control signal to the matching network, and the matching network controls the ratio tuning element in accordance with the ratio control signal. The RF controls system operates in a continuous and pulse mode of operation. The controller can also control the rise or fall of a pulse edge or a level or duration of incremental changes in the pulse edge.Type: ApplicationFiled: July 13, 2015Publication date: January 19, 2017Inventors: David J. COUMOU, Ross REINHARDT, Yuiry ELNER, Daniel M. GILL
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Patent number: 9336995Abstract: A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.Type: GrantFiled: April 10, 2014Date of Patent: May 10, 2016Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Michael L. Kirk, Daniel M. Gill
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Publication number: 20140320013Abstract: A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.Type: ApplicationFiled: April 10, 2014Publication date: October 30, 2014Applicant: MKS INSTRUMENTS, INC.Inventors: David J. COUMOU, Michael L. KIRK, Daniel M. GILL
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Patent number: 6555994Abstract: The present control circuit and method extends the operating range of digitally sampled control loops. A programmable output of a generator is controlled. The programmable output includes a an output level having a corresponding set point. The generator has a drive input that is driven to an actual drive point for controlling the output level of the programmable output. A set point corresponding to a requested output level is determined. A predicted drive point is then determined. The actual drive point of the generator drive input is forced to the predicted drive point. The output level of the programmable output is sensed. A digital output signal that is representative of the sensed output level is generated. The actual drive point of the generator drive input is controlled based on the digital output signal, such that the output level of the programmable output is controlled. The actual drive point corresponding to the requested output level is then stored.Type: GrantFiled: October 11, 2000Date of Patent: April 29, 2003Assignee: ENI Technology, Inc.Inventors: Anthony R. A. Keane, Daniel M. Gill