Patents by Inventor Daniel M. Sykora

Daniel M. Sykora has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In situ calibration of interferometers
    Patent number: 9234739
    Abstract: In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.
    Type: Grant
    Filed: October 31, 2014
    Date of Patent: January 12, 2016
    Assignee: Zygo Corporation
    Inventors: Daniel M. Sykora, Michael Kuechel
  • In situ calibration of interferometers
    Patent number: 9103649
    Abstract: In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: August 11, 2015
    Assignee: Zygo Corporation
    Inventors: Daniel M. Sykora, Michael Kuechel
  • IN SITU CALIBRATION OF INTERFEROMETERS
    Publication number: 20150055139
    Abstract: In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.
    Type: Application
    Filed: October 31, 2014
    Publication date: February 26, 2015
    Inventors: Daniel M. Sykora, Michael Kuechel
  • IN SITU CALIBRATION OF INTERFEROMETERS
    Publication number: 20130063730
    Abstract: In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.
    Type: Application
    Filed: September 10, 2012
    Publication date: March 14, 2013
    Applicant: ZYGO CORPORATION
    Inventors: Daniel M. Sykora, Michael Kuechel