Patents by Inventor Daniel Mackenzie

Daniel Mackenzie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR BLENDING PROCESS MATERIALS
    Publication number: 20080062813
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Application
    Filed: November 14, 2007
    Publication date: March 13, 2008
    Applicant: CELERITY, INC.
    Inventors: Jeffrey Wilmer, Daniel Mackenzie, John Lull, Eric Zadai, Michael Walker