Abstract: A stage assembly for holding a work-piece in a charged particle microscopy system includes a magnetic motor (e.g., brushless linear servo motor) for driving an X-platform riding on a base along the X axis, a non-magnetic linear motor (e.g., piezoelectric motor) for driving a Y-platform riding on the X-platform along the Y axis, and a non-magnetic rotary motor (e.g., piezoelectric motor) for rotating a rotary platform over the Y-platform, wherein the duty cycle of the magnetic motor is substantially greater than the duty cycle of the non-magnetic linear and rotary motors. This along with the particular arrangement of the motors and the platforms yields a compact, durable, and vacuum compatible stage which has minimal mechanical vibrations, minimal interference with the charged particle microscope, minimal particle generation, and high speed area coverage.

Abstract: An apparatus for improving the resolution of images produced by an electron microscope is provided and includes an electron beam forming an electron image, a support structure mounted in the path of the electron beam, with the support structure transmitting the electron image. Scintillating material is coated onto the side of the support structure opposite that on which the electron image is incident, the scintillating material converting the electron image into a light image. A mirror is provided for deflecting the optical path of the light image into a CCD camera positioned to receive and record the light image.