Patents by Inventor Daniel P. Forster

Daniel P. Forster has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OZONATION FOR ELIMINATION OF BACTERIA FOR WET PROCESSING SYSTEMS
    Publication number: 20090044838
    Abstract: In a first aspect, an apparatus adapted to clean a semiconductor device manufacturing component is provided. The apparatus includes an ozone module adapted to (1) obtain Ozone; (2) combine the Ozone with a fluid to generate ozonated fluid; and (3) deliver the ozonated fluid to the semiconductor device manufacturing component so as to clean the semiconductor device manufacturing component. Numerous other aspects are provided.
    Type: Application
    Filed: October 12, 2008
    Publication date: February 19, 2009
    Inventors: Bruce Willing, Daniel P. Forster, David Datong Huo, Robert D. Tolles, Christopher L. Haynes, Steven T. Mear, David Paul, William M. Evans